Device for treating chemical gaseous phase deposition furnace exhaust

A chemical vapor deposition and tail gas technology, applied in chemical instruments and methods, dispersed particle separation, separation methods, etc., can solve problems such as complex structure and affecting the separation effect of macromolecular hydrocarbons, and achieve good heat transfer effect

Pending Publication Date: 2019-05-28
XIAN AVIATION BRAKE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] In order to overcome the deficiencies in the prior art of complex structures and affecting the separation effect of macromolecular hydrocarbons, the present invention proposes a device for treating tail gas of chemical vapor deposition furnaces

Method used

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  • Device for treating chemical gaseous phase deposition furnace exhaust
  • Device for treating chemical gaseous phase deposition furnace exhaust
  • Device for treating chemical gaseous phase deposition furnace exhaust

Examples

Experimental program
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Embodiment Construction

[0027] In this embodiment, a system device for treating tail gas of a chemical vapor deposition furnace is proposed in view of the shortcomings of the existing chemical vapor deposition process for cleaning tar during the production process and the problem of short continuous operation time.

[0028] This embodiment includes a chemical vapor deposition furnace body 1 , an exhaust gas pipeline 2 , a tar collecting tank 3 , a baffle 4 , a scrubbing tank 5 , a circulating heating oil inlet 6 and a circulating heating oil outlet 7 . in:

[0029] Such as figure 1 As shown, the upper end of the tail gas pipeline 2 communicates with the upper orifice of the chemical vapor deposition furnace body 1 ; the lower end of the tail gas pipeline 2 communicates with the inlet of the tar collection tank 3 . The outlet of the tar collecting tank 3 is communicated with the inlet of the scrubbing tank 5 through a circulation pipeline. The outlet of the scrubbing tank is communicated with a vacu...

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PUM

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Abstract

The invention discloses a device for treating chemical gaseous phase deposition furnace exhaust. The upper end of an exhaust pipeline is communicated with a chemical gaseous phase deposition furnace body, and the lower end of the sandwich-structured exhaust pipeline is communicated with an inlet of a tar collection tank. An outlet of the tar collection tank is communicated with the inlet of a gaswasher through a cycle pipeline. A plurality of spirally-distributed baffle plates are distributed on the circumferential surface in the exhaust pipeline, so that exhaust generated by high-temperaturereaction in a chemical gaseous phase deposition furnace is intercepted and blocked layer by layer, a great amount of tar, dust, carbon black and the like is changed from gas into solid and condensedon the baffle plates and the wall of the exhaust pipeline, a great number of side products such as tar are prevented from being quickly absorbed into a vacuum system, long-time continuous operation ofthe vacuum system is maintained.

Description

technical field [0001] The invention relates to a chemical vapor deposition furnace, in particular to a device for treating tail gas of a chemical vapor deposition furnace. Background technique [0002] Carbon-based composite material is a kind of composite material with special properties. Its main preparation method is chemical vapor deposition process. Adding hydrocarbon compounds such as methane, propylene, etc., hydrocarbon compounds undergo a series of cracking and polymerization reactions at high temperature to form a series of hydrocarbon product systems with different molecular weights and a wide range of molecular weight distribution. Among these products, the ones with large molecular weight Part of it is attached to the carbon fiber prefabricated body and transformed into deposited carbon after dehydrogenation reaction; the rest is discharged from the working area of ​​the chemical vapor deposition furnace in the form of gas, and enters the exhaust system as tail...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/00B01D45/08B01D53/18
Inventor 李培元薛亮杨睿欣崔鹏周蕊王岩
Owner XIAN AVIATION BRAKE TECH
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