A high-throughput microfluidic body wave sorting chip and its preparation method

Abstract

The invention discloses a high-flux microfluidic body-wave sorting chip and a preparation method thereof. The high-flux microfluidic body-wave sorting chip is composed of glass sheets with a standingwave reaction cavity and a piezoelectric ceramic piece. The standing wave reaction cavity of the glass sheets is composed of channels and sample inlets and sample outlets, wherein the channels are formed among the glass sheets by sequentially packing a glass substrate, a glass gasket I, a glass spacer I, a glass gasket II, a glass spacer II and a glass top sheet from bottom to top by using an ultraviolet curing adhesive through lamination, the sample inlets and the sample outlets are formed in the channels, the width of the channels is of a centimeter level, and the height of the channels is of a micron level; so that high-flux liquid can be introduced. The piezoelectric ceramic piece is adhered to the bottom of the glass substrate, and two wires are led out of two poles. Under the drivingof an additional electric signal, the piezoelectric ceramic generates a standing wave field in the vertical direction of the channels, and different particles are sorted from the vertical direction.The preparation method disclosed by the invention is simple in preparation process, low in cost and strong in controllability, and is conveniently suitable for high-flux gathering, separating and controlling of biological samples such as cells and the like.

Description

technical field [0001] The invention belongs to the field of micro-total analysis, in particular to a bulk acoustic wave-based high-throughput sorting chip and a preparation method thereof. Background technique [0002] Microfluidic chip technology originated in the 1990s and was initially applied in the field of analytical chemistry. It is characterized by microchannels and life sciences as the main research object. Through micro-electromechanical processing technology (MEMS), the functions of the entire laboratory Including sample pretreatment, reaction, separation, detection, etc. are integrated on the microchip, which greatly improves the analysis speed. It has the characteristics of high integration, low reagent consumption, low production cost, and high analysis efficiency. It has extremely wide applicability and The application prospect is the focus of current research on the micro-total analysis system. [0003] For particles in the fluid whose particle size is smal...

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Problems solved by technology

[0004] At present, in the microfluidic system, devices are sorted in the horizontal direction, resulting in a relatively low sorting flux (<1mL / min), and the preparation is complicated. Generally, the wet etching method is used to separate the components on hard surfaces such as silicon wafers. Etch a micro-network structure on the material, drill holes on the silicon wafer with a pulse laser, and then bond the glass to the silicon wafer with the microstructure etched by anodic bonding to form an acoustic wave chip. Millions of anodic bonding equipment, which increases the cost of preparation

And it faces a high temperature and high voltage working environment, which is not conducive to the safety of the experimenter

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