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A kind of production method of high-purity ethyl orthosilicate

A technology of tetraethyl orthosilicate and production method, which is applied in the direction of silicon organic compounds, etc., can solve the problems of increasing production costs, changing semiconductor performance, and affecting chip performance, etc.

Active Publication Date: 2020-04-07
SUZHOU JINHONG GAS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] A small amount of metal doping of silicon dioxide film will change its semiconductor performance, which will affect the performance of the final chip
However, this method requires a complexing agent, which will introduce new metal ion impurities, and the preparation of equipment through sub-boiling distillation is difficult, high energy consumption, and low efficiency, which increases the production cost of the product and cannot be continuously produced.

Method used

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  • A kind of production method of high-purity ethyl orthosilicate
  • A kind of production method of high-purity ethyl orthosilicate
  • A kind of production method of high-purity ethyl orthosilicate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] The crude tetraethyl orthosilicate flow rate is 0.7m / s, from the crude tetraethyl orthosilicate storage tank through the feed delivery pump, feeds it from the middle and upper part of the light distillation tower T01 of tetraethyl orthosilicate, rectification The temperature is 180°C; the pressure is 0.05bar; the temperature of condensation at the top of the tower is 130°C during the lightening and rectifying; the reflux ratio of lightening and rectifying is 10; Unreacted ethanol, triethoxysilane, methyltriethoxysilane, methoxytriethoxysilane and other light components; the weight of the light components removed is 1 / 8 of the mass of the crude product of ethyl orthosilicate .

[0040] The product after lightening and rectification is transported to the adsorber at a flow rate of 0.7m / s through the discharge pump of the tetraethyl orthosilicate tower, and the direction of the flow of the salt tetraethyl orthosilicate in the adsorber is sequentially Filled with spherical...

Embodiment 2

[0049] The flow rate of crude orthosilicate is 0.5m / s. From the crude orthosilicate storage tank through the feed pump, feed it from the middle and upper part of the light distillation column T01 of orthosilicate, and rectify The temperature is 165° C.; the pressure is 0 bar; the temperature of condensation at the top of the tower during the lightening distillation is 120° C.; the reflux ratio of the lightening distillation is 20; Light components such as ethanol, triethoxysilane, methyltriethoxysilane, methoxytriethoxysilane and the like in the reaction; the quality of removing the light components is 1 / 12 of the mass of the crude ethyl orthosilicate.

[0050] The product after lightening and rectifying is transported to the adsorber at a flow rate of 0.5m / s through the discharge pump of the tetraethyl orthosilicate tower, and the direction of the flow of the salt tetraethyl orthosilicate in the adsorber is sequentially Filled with spherical activated carbon (particle size 5m...

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Abstract

The invention provides a production method of high-purity ethyl orthosilicate. The production method comprises the following steps: S1) carrying out light component removal rectification on a ethyl orthosilicate crude product to obtain a product after light component removal rectification; S2) treating the product after light component removal rectification by an adsorber to obtain a treated product, wherein the adsorber is sequentially filled with spherical activated carbon, cation exchange resin and titanium dioxide nano-tubes; and S3) carrying out heavy component removal rectification on the treated product to obtain high-purity ethyl orthosilicate. Compared with the prior art, according to the production method provided by the invention, adsorber treatment is carried out before heavy component removal rectification, spherical activated carbon is used as a first-stage adsorption material to adsorb a certain amount of metal ions, then second-stage cation exchange resin is used to exchange and remove a plurality of metal ions and sodium ions, and then the material enters third-stage titanium dioxide nano-tubes to adsorb and remove sodium ions, thus overcoming weaknesses of a continuous rectification process; and meanwhile, the method has the advantages of simple equipment, low energy consumption and continuous and stable production process.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, in particular to a production method of high-purity ethyl orthosilicate. Background technique [0002] The integrated circuit industry is one of the fastest-growing high-tech industries at present. Various chips produced by it are widely used in industrial equipment and machinery and electrical equipment used in daily life. The matching ultra-high-purity electronic chemicals It belongs to the field of fine chemical industry in the chemical industry. Its most typical technical characteristics are high purity and stable quality. It is a high-tech industry with high technology content, high investment and high added value. It will surely become the fastest growing, One of the most dynamic industries. [0003] my country's ultra-high-purity electronic chemicals industry has developed rapidly. In recent years, the average annual growth rate of the ultra-high-purity electronic chemicals manufac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C07F7/04
Inventor 金向华王新喜栗鹏伟孙猛师东升夏致远许军州
Owner SUZHOU JINHONG GAS CO LTD