Preparation method of multifunctional film with micro-nano structure
A technology for micro-nano structure and thin film preparation, which is applied in micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc. Cleanliness, suitable for promotion and use, the effect of simple steps
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Embodiment 1
[0035] Polymer film in the present embodiment is PDMS film
[0036] Preparation of aluminum base: 2-inch n-type Si(100) substrate (0.02Ω·cm) was soaked in HF acid solution for 15s to remove SiO 2 Take it out, dry it with 99.99% nitrogen, and place it in an electron beam evaporation device, with a temperature not higher than 2nm·s -1 The deposition rate is preferably 2nm·s -1 Deposit a 1-2 μm thick aluminum film on a Si substrate at a deposition rate of ', the purity of the aluminum film is 99.99%, preferably a thickness of 2 μm, and then post-anneal at 500 ° C for 4 hours to obtain an Al / Aluminum base of Si stack structure, such as figure 2 As shown, wherein the size of the aluminum particles deposited on the Si substrate is 100nm-2μm.
[0037] Preparation of roller imprint template: AAO self-assembly growth is performed on the Al / Si stack, and the aluminum substrate is placed in 0.1-0.5mol / L, preferably 0.3mol / L oxalic acid solution for the first anodic oxidation for a f...
Embodiment 2
[0041] Compared with Example 1, this example is different in that Example 1 prepares a multifunctional film in a laboratory, and this example is suitable for producing a multifunctional film on a large scale. The polymer film used in this example is an ultraviolet curing type , taking PMMA film as an example.
[0042] The preparation of the aluminum base is the same as in Example 1.
[0043] The preparation of the roller embossing template is the same as that of Example 1.
[0044] Such as figure 1 Shown, the preparation of multifunctional film comprises the following steps:
[0045] 1) Install the prepared cylinder imprinting template on the structure imprinting cylinder 5 .
[0046] 2) The embossing cylinder 5 is rotated, and at the same time, a layer of anti-sticking liquid is applied on the surface of the embossing template with the anti-sticking liquid smear cloth B. It can ensure to a certain extent that the imprinted polymer film can be completely detached from the ...
Embodiment 3
[0050] Compared with Example 2, this example differs in that the polymer film used in this example is thermoplastic, taking the PDMS film as an example, it is only different in step 4) during the preparation process, specifically:
[0051] After one round of embossing in step 3), the PDMS film will be embossed by the second structural embossing cylinder 5 and the low-temperature embossing cylinder 4 . Turn off the ultraviolet light beam A placed above the source of the PDMS multifunctional film on the structural impression roller 5 and the low-temperature impression roller 4, and only use the low-temperature impression roller 4 to cure and cool down the PDMS multifunctional film. After the treatment is completed, the final PDMS multifunctional film, and easy to release.
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Abstract
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