Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof

A technology of gate-controlled pulse and manufacturing process, which is applied in the electron/ion gun and non-luminous electrode manufacturing of transit time electron tubes, etc. The normal operation of the tube and the reduction of the work function of the grid surface can improve the reliability and service life of the work, the repeatability is stable, and the bonding strength is improved.

Active Publication Date: 2019-07-02
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At the same time, because the distance between the cathode and the grid is very small, usually less than 1mm, when the cathode is working, the emitter evaporated from the cathode is easy to deposit on the grid, which will reduce the work fun

Method used

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  • Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof
  • Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof
  • Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof

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Embodiment 1

[0026] Such as figure 1 As shown, the grid of the present invention is used in a grid-controlled pulse traveling wave tube electron gun to suppress electron emission from the grid of a grid-controlled pulse traveling wave tube. The manufacturing steps are: using molybdenum as the grid base material, and forming the molybdenum grid The substrate is cleaned and high-temperature vacuum degassing treatment; ion beam assisted deposition method is used to ion implant Nb and deposit Nb film on the molybdenum grid substrate, the ion beam (Ar+) energy is 850eV, and the background vacuum is better than 1×10 -4 Pa, working pressure is 2.4×10 -2 Pa, the functional gradient layer is prepared, and the thickness of the functional gradient layer is 1.1um; the ion beam assisted deposition method is used to first ion implant Hf and deposit Hf coating on the Nb film, and then deposit C coating on it, ion beam (Ar+ ) Energy is 800eV, background vacuum is better than 1×10 -4 Pa, working pressure is 5...

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Abstract

The invention discloses a grid used in a grid-controlled pulse traveling wave tube electron gun and a manufacturing process thereof. The grid includes a grid substrate made of molybdenum, a gradient functional layer formed on the grid substrate and a composite anti-grid electron emission film formed on the gradient functional layer. The gradient functional layer is prepared by Nb or Ta. The composite anti-grid electron emission film is prepared by using a high-melting point material having a work function of more than 4 eV. The manufacturing process includes the following steps: (1) performinghigh temperature vacuum degassing on the formed grid substrate of a molybdenum material at 700-1000 DEG C; (2) preparing the gradient functional layer on the grid substrate by using ion implantationand vacuum deposition coating; (3) preparing the composite anti-grid electron emission film on the gradient functional layer by using the ion implantation and vacuum deposition coating; and (4) performing high temperature heat treatment on the prepared grid. The grid of the invention can suppress grid electron emission of a grid-controlled pulse traveling wave tube and improve the working reliability and service life of the grid-controlled pulse traveling wave tube.

Description

Technical field [0001] The invention relates to a grid used in a grid-controlled pulse traveling wave tube electron gun and a manufacturing process thereof, belonging to the technical field of microwave electric vacuum. Background technique [0002] Grid-controlled pulse traveling wave tube has a series of advantages such as high gain, large power, wide working frequency, small size, light weight, and good reliability, making it suitable for satellite communications, missile guidance, radar reconnaissance, remote sensing and telemetry, electronic countermeasures and The key components of spacecraft positioning and docking equipment play an important role in the defense and aerospace fields. [0003] When the grid-controlled pulse traveling wave tube is working, since the working temperature of the cathode is as high as 1000-1050°C, a high-temperature resistant metal material must be used as the grid. At present, the grid-controlled pulse traveling wave tube uses molybdenum (Mo) as...

Claims

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Application Information

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IPC IPC(8): H01J23/06H01J9/14
CPCH01J9/14H01J23/06
Inventor 吕琴丽李帅王树茂
Owner GRIMAT ENG INST CO LTD
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