Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof
A technology of gate-controlled pulse and manufacturing process, which is applied in the electron/ion gun and non-luminous electrode manufacturing of transit time electron tubes, etc. The normal operation of the tube and the reduction of the work function of the grid surface can improve the reliability and service life of the work, the repeatability is stable, and the bonding strength is improved.
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[0026] Such as figure 1 As shown, the grid of the present invention is used in a grid-controlled pulse traveling wave tube electron gun to suppress electron emission from the grid of a grid-controlled pulse traveling wave tube. The manufacturing steps are: using molybdenum as the grid base material, and forming the molybdenum grid The substrate is cleaned and high-temperature vacuum degassing treatment; ion beam assisted deposition method is used to ion implant Nb and deposit Nb film on the molybdenum grid substrate, the ion beam (Ar+) energy is 850eV, and the background vacuum is better than 1×10 -4 Pa, working pressure is 2.4×10 -2 Pa, the functional gradient layer is prepared, and the thickness of the functional gradient layer is 1.1um; the ion beam assisted deposition method is used to first ion implant Hf and deposit Hf coating on the Nb film, and then deposit C coating on it, ion beam (Ar+ ) Energy is 800eV, background vacuum is better than 1×10 -4 Pa, working pressure is 5...
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