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Molybdenum step target and manufacturing method thereof

A step and frame technology, which is applied in the field of molybdenum step target and its manufacturing, can solve the problems of high molybdenum hardness, difficult molybdenum step target processing and forming, and poor machining performance, so as to improve confidence, facilitate picking, and prevent part deformation Effect

Active Publication Date: 2019-07-09
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Application Information

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Problems solved by technology

Due to the high hardness and poor machinability of molybdenum, diamond tools cannot be used for processing. Therefore, it is difficult to realize the overall processing and forming of molybdenum step targets by machining, and after general metal materials are machined to tens of microns, large cracks will occur. out of shape
At present, molybdenum step targets are generally prepared by rolling molybdenum thin films, which are compounded by vacuum diffusion bonding technology (document: K. Du et al. Nuclear Instruments and Methods in Physics Research A 596 (2008) 253–255), but This process generally introduces an intermediate transition layer or has a small gap, which may affect the results of physical experiments

Method used

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  • Molybdenum step target and manufacturing method thereof
  • Molybdenum step target and manufacturing method thereof

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Embodiment 1

[0028] The outer dimension of the molybdenum step target prepared in this example is 10000 μm in length × 10000 μm in width, the frame width of the molybdenum step target is 100 μm, the inner base is 4900 μm in length × 9800 μm in width × 30 μm in thickness, and the steps are 4900 μm in length × 9800 μm in width × 40 μm in thickness . Its preparation process is as follows:

[0029] a. Using rolled molybdenum thin film, the molybdenum thin film is 100 μm thick, and processed into 10000 μm×10000 μm molybdenum blank by slow wire cutting;

[0030] b. Measure the thickness value H1 of the molybdenum blank by laser confocal measuring device;

[0031] c. Clamp the metal block with flat surface on the electric discharge milling machine;

[0032] d. Process the horizontal plane on the surface of the metal block by electric discharge milling, the size of the horizontal plane is 12000 μm × 12000 μm, and at the same time, the coordinate value H2 of the horizontal plane of the metal bloc...

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Abstract

The invention discloses a molybdenum step target and a manufacturing method thereof. A substrate of the molybdenum step target is a plane, the periphery of the substrate is surrounded by a closed frame, and horizontal steps are arranged on the substrate and inside the frame. According to the molybdenum step target, the influences of a middle layer or a gap between the steps on a physical test canbe avoided; and through the frame reserved on the molybdenum step target, deformation of the machined step target can be effectively prevented, and operation such as pickup is convenient. According tothe manufacturing method of the molybdenum step target, a molybdenum film with extremely-high purity is adopted as a raw material, by modeling molybdenum step target machining, a numerical-control machining program is generated, an electric spark milling machining technology is adopted, and the step in the middle area of the molybdenum film is machined.

Description

technical field [0001] The invention belongs to the field of ultra-precision micromachining, and in particular relates to a molybdenum step target and a manufacturing method thereof. Background technique [0002] The high-pressure equation of state (EOS) of materials is an important research content of inertial confinement fusion. At the same time, it is of great significance to the study of astrophysics, geophysics, and the strong loading effect of materials. Impedance matching method is a common method to study the high-voltage equation of state of materials, and one of the prerequisites for studying the high-voltage equation of state of materials through the principle of impedance matching is to first study and master the parameters of the equation of state of standard materials. Molybdenum (Mo) is a good standard material for studying the high-pressure state equation of materials. The reasons are as follows: the shock adiabatic line relationship of Mo remains linear, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00
CPCB23P15/00
Inventor 谢军杨洪魏胜蒋柏斌高莎莎胡勇袁光辉童维超梁榉曦张昭瑞何智兵张海军李国宋成伟
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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