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A kind of acidic polishing liquid and its application in the yag series material that obtains ultra-smooth surface

A polishing liquid and acid technology, applied in the direction of water-based dispersant, can solve the problems of high polishing cost, complex process, low polishing efficiency, etc., and achieve the effect of improving smoothness, polishing efficiency, good lubrication and heat dissipation.

Active Publication Date: 2021-02-02
成都东骏激光股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a kind of acidic polishing liquid and its application in the YAG series material that obtains ultra-smooth surface, has overcome the existence process complexity of non-contact polishing technology such as existing assisted chemical etching and ion beam polishing etc., polishing Inefficiency, high cost of polishing problems, and provide an acidic polishing liquid and its application in YAG series materials to obtain ultra-smooth surface

Method used

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  • A kind of acidic polishing liquid and its application in the yag series material that obtains ultra-smooth surface
  • A kind of acidic polishing liquid and its application in the yag series material that obtains ultra-smooth surface
  • A kind of acidic polishing liquid and its application in the yag series material that obtains ultra-smooth surface

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Effect test

Embodiment 1

[0051] An acidic polishing liquid, its preparation process is as follows: mix concentrated sulfuric acid, glacial acetic acid, ammonium dichromate, phosphoric acid and water according to the mass ratio of 1:1:1:0.8-1.2:50, add distilled water to dilute to pH when using for 3-5.

Embodiment 2

[0069] A method for obtaining an ultra-smooth surface on a single-sided polished Yb of 40 × 40 × 5 mm in size: a method for obtaining an ultra-smooth surface, comprising the following steps:

[0070] 1) Heating the upper plate: heat the 40×40×5mm Yb:YAG square piece and the aluminum plate to 100-110°C, apply adhesive wax evenly on the aluminum plate, and then bond the Yb:YAG square piece to the aluminum plate superior;

[0071] 2) Grinding: Grinding with 280# boron carbide abrasive to remove cutting knife marks on the crystal surface → Grinding with W40 boron carbide abrasive 0.06mm to remove the coarse pores left by 280# boron carbide grinding → Grinding with W20 boron carbide abrasive 0.05mm to remove W40 boron carbide grinding Coarse trachoma left → W10 boron carbide abrasive grinding 0.03mm to remove the coarse trachoma left by W20 boron carbide grinding.

[0072] 3) Polishing: use a mixture of W1 white corundum powder and acid polishing solution to polish on a polyuretha...

Embodiment 3

[0076] The method for obtaining an ultra-smooth surface on a double-sided polished pure YAG wafer whose size is φ 10 × 4mm comprises the following steps:

[0077] 1) Heating the upper plate: heat the φ10×4mm pure YAG disc and the aluminum plate to 100-110°C, apply adhesive wax evenly on the aluminum plate, and then bond the YAG disc to the aluminum plate;

[0078] 2) Grinding the first side: Grinding with 280# boron carbide abrasives to remove cutting knife marks on the crystal surface → Grinding 0.04mm with W40 boron carbide abrasives to remove coarse blisters left by 280# boron carbide grinding → Grinding 0.03mm with W20 boron carbide abrasives to remove W40 Coarse blisters left by boron carbide grinding → W10 boron carbide abrasive grinding 0.02mm to remove coarse blisters left by W20 boron carbide grinding.

[0079] 3) Polish the first side: use the mixture of W1 white corundum powder and acid polishing solution to polish on the polyurethane polishing pad for about 8 hours...

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Abstract

The invention discloses an acidic polishing solution and its application in YAG series materials for obtaining ultra-smooth surfaces. The preparation of the acidic polishing solution comprises the following steps: mixing concentrated sulfuric acid, glacial acetic acid, ammonium dichromate, phosphoric acid and water according to The mass ratio is 1:1:1:0.8‑1.2:50, and diluted with water to a pH of 3‑5 when used. Use this acidic polishing solution to polish the surface of YAG series materials to obtain ultra-smooth surface YAG series materials. .

Description

technical field [0001] The invention relates to the technical field of crystal polishing, and in particular to an acidic polishing liquid and its application in YAG series materials for obtaining ultra-smooth surfaces. Background technique [0002] As the most important optical component in a high-power laser system, a large-size YAG laser crystal has both high power density operation requirements and high beam quality requirements. Therefore, obtaining an ultra-smooth surface on the surface of a large-size YAG crystal is the key to realizing a high-power laser system. necessary condition. [0003] In order to obtain an ultra-smooth surface, researchers at home and abroad have conducted a lot of research on different polishing methods on the surface of fused silica in recent decades, but the research on obtaining an ultra-smooth surface on the surface of YAG crystal is basically blank. In addition, all kinds of new polishing methods generally have problems such as complicat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/04B24B1/00
CPCB24B1/00C09G1/04
Inventor 陈丽英李兵
Owner 成都东骏激光股份有限公司