VDMOS device with L-shaped dielectric layer and low EMI
A dielectric layer, L-shaped technology, applied in the electronic field, to achieve the effect of increasing capacitance, simple structure, and reducing circuit volume
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[0025] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
[0026] In the prior art, the VDMOS primary cell structure usually includes a metal electrode 101 at the drain end, an N-type heavily doped active region 102 at the drain end is above the metal electrode 101 at the drain end, and an N-type heavily doped active region 102 at the drain end is above the N-type heavily doped active region 102 at the drain end. Type lightly doped drift region 103, two source well regions 104 are symmetrically distributed on the upper end of the N-type lightly doped drift region, the upper end surface of the drift region is covered with gate silicon dioxide 105, and the entire source well region 104 is P-type light Doping, a fourth N-type heavily doped region 106 and a P-type heavily doped region 107 are arranged above the source well region, part of the region above the source well region 104 is covered with gate silicon ...
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