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Preparation method of ultrathin quartz glass plate

A quartz glass sheet and ultra-thin technology, which is applied in the field of preparation of ultra-thin quartz glass sheets, can solve the problems of fragmentation thickness and unevenness of quartz glass sheets, and achieve the effect of overcoming fragmentation and uneven thickness and avoiding fragmentation.

Inactive Publication Date: 2019-10-11
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the thickness limit of the quartz glass sheet obtained by mechanical grinding and polishing is about 0.2 mm.
Since quartz glass is a brittle material, if you continue to use mechanical methods to thin it, there will be problems such as fragmentation of quartz glass sheets and uneven thickness during processing.

Method used

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  • Preparation method of ultrathin quartz glass plate

Examples

Experimental program
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Effect test

preparation example Construction

[0026] The present invention proposes a method for preparing an ultra-thin quartz glass sheet, which combines precision mechanical polishing and acid etching to prepare an ultra-thin quartz glass sheet; the thickness of the ultra-thin quartz glass sheet is ≤100 μm, and the thickness uniformity is -2μm~2μm, surface roughness Ra≤2nm.

[0027] Grinding and polishing is a surface processing process to obtain glass of required size and surface quality. Precision mechanical grinding and polishing will be more finely controlled than mechanical grinding and polishing. For ultra-thin sheets, precision mechanical polishing is to obtain good thickness uniformity and surface roughness, and hydrofluoric acid etching is to reduce the thickness to less than 100 μm; neither method alone can achieve the thickness ≦100μm, thickness uniformity of -2μm~2μm, and ultra-thin sheet processing with surface roughness≦2nm.

[0028] Before the quartz glass sheet of the present invention is ground, the ...

Embodiment 1

[0053] The present invention proposes a kind of preparation method of ultra-thin quartz glass sheet, comprises the following steps:

[0054] 1) Rough processing of quartz glass sheet: before grinding, the quartz glass sheet is ground or roughly ground, and its thickness is controlled to be 0.4mm;

[0055] 2) Precision mechanical grinding and polishing: use nodular cast iron as the grinding medium, and Al2O3 particles with a particle size of 10 μm are used as the abrasive for double-sided grinding, and the thickness of the removed quartz glass sheet is 80-170 μm; polyurethane is used as the polishing medium, and the particle size is 50-100nm. SiO2 particles are used as polishing powder for double-sided polishing, and the thickness of the removed quartz glass sheet is 20 to 30 μm; through this step, the quartz glass sheet is processed to a thickness of 0.2 to 0.3 mm, with a thickness uniformity of -5 μm to 5 μm, and a rough surface The first quartz glass polished piece with Ra≤1...

Embodiment 2-6

[0061] Step is with embodiment 1.

[0062] The process parameters of each embodiment were adjusted according to the data in Table 1 below, and the dimensions of the prepared ultra-thin quartz glass sheets are shown in Table 1.

[0063] Table 1 Process parameters and product performance of Examples 1-6

[0064]

[0065] As can be seen from the process parameters of Examples 1 to 6 shown in the above Table 1 and the performance data of the prepared products, the technical solution of the present invention uses a combination of precision mechanical polishing and hydrofluoric acid etching to process quartz glass Through the matching and coordination of process parameters in each process, the fragmentation of quartz glass flakes during the preparation process is avoided, and the thickness uniformity and surface roughness of ultra-thin quartz glass flakes are also improved. The prepared ultra-thin quartz glass sheet has a thickness of ≤100 μm, a thickness uniformity of -2 μm to ...

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Abstract

The invention provides a preparation method of an ultrathin quartz glass plate. The preparation method comprises prepares an ultrathin quartz glass plate by the combination of a precision mechanical polishing process and an acid etching process; the ultrathin glass plate has thickness of < / =100 mu m, the thickness uniformity is -2 to 2 mu m, and surface roughness Ra is < / =2 nm. The preparation method comprises the steps of grinding and polishing a quartz glass plate through precision mechanical polishing to obtain a first quartz glass plate; washing the first quartz glass plate; carrying out acid etching to obtain an ultrathin quartz glass plate. hydrofluoric acid used in acid etching has a concentration of 10-20 mol / L, the temperature of acid etching is 30-40 DEG C, and acid etching rateis < / =1 mu m / min. The quartz glass plate is machined via the preparation method by the combination of precision mechanical polishing and hydrofluoric acid etching; process parameters of the steps arefitly coordinated, breaking of the ultrathin quartz glass plate during preparation is avoided, thickness uniformity of the ultrathin quartz glass plate is improved, and therefore, the ultrathin quartzglass plate is more applicable.

Description

technical field [0001] The invention belongs to the field of ultra-thin quartz glass sheet manufacturing, and particularly relates to a preparation method of an ultra-thin quartz glass sheet with a thickness ≤ 100 μm, a thickness uniformity of -2 μm to 2 μm and a surface roughness Ra ≤ 2 nm. Background technique [0002] Ultra-thin sheets of quartz glass can be used as high-frequency circuit substrates for fabricating microcircuits on their surfaces. With the development of science and technology, the frequency band is gradually increased from microwave, millimeter wave, and terahertz wave, which put forward higher requirements for the thickness uniformity and surface roughness of high-frequency circuit substrates. [0003] Mechanical grinding and polishing is the most commonly used optical method for processing optical materials such as quartz glass, sapphire and crystal. This method makes the glass surface smooth and reduces the surface roughness of the glass by physical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C15/00B24B1/00
CPCB24B1/00C03C15/00
Inventor 杜秀蓉张晓强孙元成宋学富王慧钟利强杨晓会
Owner CHINA BUILDING MATERIALS ACAD
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