Continuous spiral phase plate preparation method based on magneto-rheological machining

A helical phase plate and magnetorheological technology, which is applied in optics, instruments, optical components, etc., can solve the problems that the processing accuracy and efficiency cannot fully meet the requirements, it is difficult to effectively process large-diameter helical phase plates, and the production efficiency is low. Achieve high processing certainty, small function size and high forming efficiency

Active Publication Date: 2019-11-01
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

[0005] Laser direct writing is a method of preparing a spiral phase plate structure. Because it is a point-by-point direct writing method, the preparation efficiency is very low, and it is difficult to effectively process a large-diameter spiral phase plate; gray-scale mask lithography is also a method. A method for preparing a continuous-structure spiral phase plate. In this method, the designed spiral phase plate mask pattern is etched onto a photoresist to form a relief structure, and then through steps such as exposure and development, the final production of the spiral phase plate is realized. , but its complex process, machining accuracy and efficiency can not fully meet the requirements

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preparation example Construction

[0041] Please see attached figure 1 , the embodiment of the present invention discloses a continuous spiral phase plate preparation method based on magnetorheological processing, including:

[0042] S1: Obtain the design surface data of the spiral phase plate, where the design surface length is m, the design surface width is n, and the unit is mm;

[0043] S2: Select the substrate, wherein the length of the substrate is not less than m, and the width is not less than n; and measure the surface data of the substrate; judge whether the surface data of the substrate satisfies PV≤1λ; if so, execute step S3; where PV represents the surface data The difference between the maximum and minimum values ​​in the middle;

[0044] When selecting the substrate, it is required that the geometric size of the substrate is not smaller than the design surface geometry of the spiral phase plate, otherwise the design pattern of the spiral phase plate cannot be completely processed on the substrat...

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Abstract

The invention discloses a continuous spiral phase plate preparation method based on magneto-rheological machining. According to the preparation method, a magneto-rheological removal function is selected based on a gradient matching method, and by utilizing the characteristics of small size, high shaping capability and high machining determinacy of the magneto-rheological machining technology removal function, a design pattern of the spiral phase plate is directly machined on the surface of a basic optical element. The method has the advantages of being simple in process, high in machining precision, high in forming efficiency and the like.

Description

technical field [0001] The invention relates to the technical field of optical processing, in particular to a method for preparing a continuous spiral phase plate based on magnetorheological processing. Background technique [0002] As a special new type of beam, the vortex beam is characterized by a spiral wavefront structure, a circular distribution of light intensity, a small central dark spot size, and a definite orbital angular momentum. These advantages make it widely used in the fields of optical micromanipulation, optical information transmission, laser optics, particle waveguide, biomedicine, atomic optics, and molecular optics. [0003] At present, the main methods for generating vortex beams are: 1) the computer reproduction holography method uses vortex light as a diffracted beam and obtains it through hologram modulation; 2) through the asymmetric structure in the laser resonator, high-order Hermitian- The Gaussian beam is converted into a vortex beam by two as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00G02B5/18
CPCB24B1/005G02B5/18G02B5/1852
Inventor 唐才学温圣林张远航颜浩嵇保建石琦凯邓燕王健张清华李昂
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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