Piezoelectric driving mutual shielding electrode micro electric field sensor

Abstract

The invention discloses a piezoelectric driving mutual shielding electrode micro electric field sensor; the micro electric field sensor mainly comprises a substrate, a fixed electrode, a movable electrode, a supporting column, an elastic beam, an insulating layer and a driving structure, wherein the movable electrode and the fixed electrode forming the sensor sensitive structure are located on thesame plane when the movable electrode and the fixed electrode are in a static state, and the movable electrode and the fixed electrode are both sensing electrodes and are mutually shielding electrodes; the driving structure composed of the driving electrode and the piezoelectric layer drives the movable electrode to move, so that the relative position of the fixed electrode and the movable electrode is changed; and the driving structure is located outside the sensing electrodes, and the driving signals have low interference to signals on the sensing electrodes. The electric field sensor can realize low-voltage driving, is beneficial for reducing coupling interference and improving the signal-to-noise ratio of the sensor. Through the arrangement of the mutual shielding electrodes, the sensing efficiency of the sensitive structure can be improved, and the resolution and sensitivity of the sensors can be improved. The electric field sensor further has the characteristics of being miniaturized, simple in structure, and convenient to integrate, batch production and the like.

Description

technical field [0001] The invention relates to the fields of sensors and micro-electromechanical systems (MEMS), in particular to a piezoelectrically driven miniature electric field sensor with mutually shielding electrodes. Background technique [0002] Electric field measurement technology has applications in many fields, and the core device of electric field measurement is the electric field sensor. Electric field sensors are widely used in many fields such as aerospace, meteorology, electric power, petroleum and petrochemical, and industrial production. [0003] Electric field sensors are widely used, and various sensor systems for different occasions have been researched according to different application occasions. According to its working principle, electric field sensors can be divided into two categories: charge-inductive electric field sensors and fiber optic sensors. The traditional electromechanical electric field sensor was developed earlier, so its technolog...

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Problems solved by technology

[0004] For the existing piezoelectric-driven miniature electric field sensors, Gong Chao et al. proposed an interlaced vibrating miniature electric field sensor, which connects the piezoelectric-driven ceramics to the sensing electrodes by gluing. The process precision is low, and it is not easy to integrate and mass-produce. low signal to noise ratio

Feng Ke et al. proposed a piezoelectric cantilever beam microsensor. The driving structure of the sensor is located directly below the sensing structure, and the noise coupling is large; and each sensing electrode of the sensor is independent of each other, so each sensing electrode has its own resonant frequency. It is impossible to ensure that all electrodes work in a resonance state, and the resolution and sensitivity are low

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