Off-location technology based REBCO superconducting film growing continuous device

Abstract

The invention provides an off-location technology based REBCO superconducting film growing continuous device. A reel-to-reel multi-pass reciprocating film coating unit deposits a target material ontoa base band to form a metal film through magnetron sputtering. The base band passes through two slits of a vacuum trap successively and gets into three quartz tubes to be subjected to heat treatment,so that the metal film on the base band absorbs oxygen to be converted into a superconducting phase superconducting film. Through the off-location technology based REBCO superconducting film growing continuous device, the technical defects are overcome; the off-location technology based REBCO superconducting film growing continuous device conducts deposition coating through the magnetron sputtering off-location technology; and the vacuum trap is introduced to serve as a transition device to enable the film coating and heat treatment processes to change into a continuous system and meanwhile can ensure that the film coating and heat treatment processes are non-interfering, that is, film coating and superconducting phase implementation can be carried out in the two different and continuous processes. The off-location technology based REBCO superconducting film growing continuous device can achieve the vacuum differential effect through a set of quartz tubes of different thicknesses and conducts heat treatment on the film under different oxygen partial pressures to realize conversion of the film from the metal film to the superconducting film

Description

technical field [0001] The invention relates to the technical field of superconducting materials, in particular to a continuous device for growing REBCO superconducting films based on off-site technology, especially a continuous coating and heat treatment device for superconducting layers prepared by off-site technology, which is a second-generation high-temperature A device for making a superconducting layer of a superconducting tape. Background technique [0002] The second-generation superconducting strip, because REBCO, which is the core of superconducting current-carrying, is hard and brittle, is generally produced on a nickel-based alloy substrate by a multi-layer coating process, so it is also called a coated conductor. The second-generation superconducting tape generally consists of a metal base tape, a buffer layer (transition layer), a superconducting layer and a protective layer. The role of the metal substrate is to provide the strip with excellent mechanical pr...

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Problems solved by technology

In the literature, it is proposed to use co-evaporation method, laser ablation method, chemical vapor deposition method, metal organic deposition method (MOD), sol-gel method and other deposition techniques to prepare premise films. It involves the magnetron sputtering method, which mainly has the following technical prejudices: 1) The atmosphere of the magnetron sputtering process is a rare gas such as argon (Ar), and the process vacuum is as high as 500mtorr (about 66.5Pa). The process atmosphere and heat treatment system The pure oxygen atmosphere (about 100m

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