Multi-mode measurement method based on self-interference micro-ring resonator optical sensor
A microring resonant cavity and optical sensor technology, applied in the field of optical microcavity sensing, can solve the problems of hindering commercialization and high sensor cost, and achieve the effects of improving detection sensitivity, reducing costs, and promoting commercialization and practicality
Active Publication Date: 2021-10-19
UNIV OF SCI & TECH OF CHINA
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Problems solved by technology
The use of expensive tuned lasers or precision optical spectrometers leads to high sensor costs, which has become one of the main constraints hindering its commercialization
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Embodiment 1
[0080] The working principle and application of the silicon nitride self-interference micro-ring resonator optical sensor will be described below as an example.
[0081] In the embodiment of the present disclosure, the self-interference microring resonator sensor chip is composed of Si3N4 waveguide based on SiO2 material, and its parameter settings are shown in Table 1.
[0082] Table 1 Silicon nitride self-interference microring resonator parameters
[0083]
[0084] If the measured substance is placed on the surface of the probe arm waveguide, it will cause the refractive index n of the probe arm waveguide L changes, an additional phase Δφ will be generated. The additional phase Δφ of the optical detection arm waveguide can be obtained from the optical path difference between the microring resonator and the detection arm waveguide, namely:
[0085]
[0086] where n R and n L are the refractive indices of the microring resonator and the probe arm waveguide, respecti...
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A multi-mode measurement method based on a self-interference micro-ring resonator sensor, comprising: inputting a detection light source into a self-interference micro-ring resonator optical sensor to detect a variety of measured substances, so as to obtain the transmission extinction of the measured substances value, and obtain the sensor detection value corresponding to the transmission extinction value, use the transmission extinction value and the sensor detection value corresponding to the transmission extinction value as training data, train the preset neural network model, and obtain the trained neural network The model optimizes each parameter in the neural network model according to the sensor detection quantity, obtains the optimized neural network model, and uses the optimized neural network model to measure the sensor detection quantity. The method provided in the present disclosure can effectively extract multi-modal sensing information to improve the detection sensitivity of the self-interference microring resonator, and combined with artificial neural network and other machine learning algorithms, skillfully avoids the complex multi-modal transmission spectrum acquisition process.
Description
technical field [0001] The disclosure relates to the field of optical microcavity sensing, in particular to a multi-mode measurement method based on a self-interference microring resonator optical sensor. Background technique [0002] Whispering gallery mode optical microcavity refers to optical components that play a role in spatial and temporal local enhancement and frequency selection of light waves. It is used in active optical devices, optical signal processing, optical interconnection, low-energy nonlinear optics, optical It has a wide range of applications in the fields of interaction with matter and sensing. [0003] In the patent (201610026981.6), a self-interference microring resonator optical sensor is designed, which includes a microring resonator coupled twice by the detection arm waveguide. The mechanism is that the detection arm waveguide will be affected by the external detection target. A small phase change results in a significant change in the outcoupling...
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IPC IPC(8): G01N21/45
CPCG01N21/45G01N2021/458G01N2201/1296
Inventor 邹长铃胡东任宏亮董春华
Owner UNIV OF SCI & TECH OF CHINA