Vertical cavity surface emitting laser and preparation method thereof

Abstract

The invention discloses a vertical cavity surface emitting laser and a preparation method thereof. The preparation method of the vertical cavity surface emitting laser comprises the steps: a first DBRlayer and a second DBR layer are formed on a first substrate and a second substrate by a magnetron sputtering method, and a light emitting layer is formed on the second DBR layer by spin coating. Theproblem that the lattice matching between the film layers needs to be considered when preparing the DBR layer and the light emitting layer by epitaxial growth can be avoided so that the materials used for preparing the first DBR layer and the second DBR layer are not limited by lattice matching, the refractive index difference between the two dielectric layers forming the first DBR layer and thesecond DBR layer can be increased, the first DBR layer and the second DBR layer can have high reflectivity only by fewer film layers, the preparation process of the device is reduced, and thus the preparation period and the preparation cost of the device can be reduced and the preparation efficiency of the device can be improved.

Description

technical field [0001] The present application relates to the field of semiconductor technology, and more specifically, to a vertical cavity surface emitting laser and a manufacturing method thereof. Background technique [0002] Lasers are the core components of optical communication systems. With the continuous development of optoelectronic technology, people have put forward higher and higher requirements for lasers. Low power consumption, miniaturization, and integration have also become one of the development directions of lasers. This makes microcavity lasers more and more people's attention. He can meet people's requirements for integrating lasers into chips, so the market for microcavity lasers has expanded rapidly in recent years. [0003] The structure of a laser includes a pump source, a resonant cavity, and a gain medium. Common pumping methods include electrical pumping, optical pumping, and chemical pumping. Microcavity lasers can be divided into whispering ...

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Problems solved by technology

[0009] In order to solve the above technical problems, the application provides a vertical cavity surface emitting laser and its preparation method to solve the problems of long VCSEL preparation cycle, high preparation cost and low preparation efficiency in the prior art

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