High-power external cavity semiconductor laser device

Abstract

The invention discloses a high-power external cavity semiconductor laser device. An outer cavity VCSEL array surface light source is composed of a plurality of VCSEL array light sources, wherein a P-type epitaxial layer of each VCSEL array light source is a multi-film total reflection P-type epitaxial layer, an N-type epitaxial layer of each VCSEL array light source is a multi-film partial reflection N-type epitaxial layer, reflectivity of each N-type epitaxial layer is 50-90%, the outer cavity VCSEL array surface light source is installed on a concave surface of a concave surface reflector, agroove is formed in the middle of a 45-degree oblique angle cylindrical reflector, and a convex surface outer cavity reflector is installed in the groove and right faces the outer cavity VCSEL arraysurface light source. The laser device is advantaged in that a coupling resonant cavity is formed by a concave reflector, the multi-film total reflection P-type epitaxial layer, the multi-film partialreflection N-type epitaxial layer and the convex outer cavity reflector, loss of different transmission modes is controlled by utilizing the feedback adjustment effect of the coupling resonant cavityof the light beam, a high-order mode is suppressed, so phase locking between array units is realized, and the light beam quality of an output light beam is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor lasers, in particular to a high-power external cavity semiconductor laser. Background technique [0002] High-power vertical-cavity surface-emitting semiconductor lasers (VCSELs) have become the most popular due to their small size, high coupling efficiency, low threshold current, high modulation rate, easy two-dimensional integration, single longitudinal mode operation, on-chip testing and low manufacturing cost. One of the important semiconductor optoelectronic devices. High-power VCSEL is not only widely used in laser printing, laser medical treatment, laser drilling, welding processing and other fields, but also widely used in laser radar, laser aiming, laser weapons, laser ranging, laser targeting, laser guidance, laser night vision , laser radar, laser fuze, laser weapons and laser countermeasures and other military fields. [0003] The transverse mode of the widely used high-power v...

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Problems solved by technology

[0003] The transverse mode of the widely used high-power vertical cavity surface emitting laser (VCSEL) is generally a high-order mode, which has problems such as uneven spot, scattered light intensity distribution, large beam divergence angle, and poor beam quality, which causes a lot of inconvenience to the application process.

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