Micro-scale initiating explosive device ignition temperature measuring device

Abstract

The invention discloses a micro-scale initiating explosive device ignition temperature measuring device. The micro-scale initiating explosive device ignition temperature measuring device comprises a monocrystalline silicon substrate, wherein a silicon dioxide insulating layer is grown on the monocrystalline silicon substrate; a platinum microstructure transduction element and a first electrode connected with the platinum microstructure transduction element are sputtered on the silicon dioxide insulating layer through an MEMS (micro-electromechanical systems) process; the first electrode is used as a voltage input end of the platinum microstructure transduction element; meanwhile, a platinum temperature sensitive element is sputtered in the middle of the platinum microstructure transductionelement by using the MEMS process; the platinum temperature sensitive element is connected with second electrodes; and an input end and an output end of the platinum temperature sensitive element areconnected with the two second electrodes respectively to form a four-wire system measuring method. According to the micro-scale initiating explosive device ignition temperature measuring device, a mature MEMS processing process is combined with the resistance temperature characteristic of a platinum material, so that the micro-scale initiating explosive device ignition temperature measuring device has the characteristics of small size of the sensitive element, high linearity, high measuring accuracy and the like.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems (MEMS) sensors, in particular to a device for measuring the ignition temperature of a micro-scale pyrotechnic product. Background technique [0002] Since the 1990s, in order to meet the needs of the development of information-based weapons and various types of micro-weapons, scholars at home and abroad have begun to study MEMS pyrotechnics, so the characterization of the output capability of pyrotechnics is essential. The scale ignition temperature test is a kind of output capability test of micro-sized pyrotechnics, which refers to the real-time temperature measurement of micro-sized pyrotechnics or microstructure transducer elements during the rapid dynamic action of pyrotechnics ignition and obtains the temperature Numerically, the measurement of ignition temperature at the microscale has become an urgent problem to be solved. [0003] Existing methods for temperature ...

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Problems solved by technology

[0003] Existing methods for temperature measurement of pyrotechnics are generally: colorimetry, bispectral method, multi-spectral temperature measurement method, optical fiber temperature measurement method, etc. Although these methods have fast response speed and have no effect on the measured object, etc. Advantages, but it cannot be in direct contact with pyrotechnics, and can only be used for large-scale pyrotechnics measurement, which cannot meet the needs of tiny pyrotechnics measurement

In the currently published literature, there are few studies on the measurement of the ignition temperature of micro-scale pyrotechnic products. The principle is to measure the combustion temperature field of the micro-scale pyrotechnic product, and determine the temperature of the object according to the relationship between the three primary color values ​​and the physical temperature, but this method has a low degree of integration and cannot measure the detonation temperature before the agent burns

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