Erosion resistant metal oxide coatings deposited by atomic layer deposition

Abstract

Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.

Description

technical field [0001] Embodiments of the present disclosure relate to corrosion resistant metal oxide coatings, coated articles, and methods of forming such coatings using atomic layer deposition. Background technique [0002] In the semiconductor industry, devices are fabricated through several fabrication processes that produce structures of ever decreasing size. Some manufacturing processes, such as plasma etching and plasma cleaning processes, expose a substrate to a high velocity stream of plasma to etch or clean the substrate. Plasmas can be highly corrosive and can corrode processing chambers and other surfaces exposed to the plasma. This corrosion can generate particles that often contaminate the substrate being processed, contributing to device defects. Bromine-containing plasmas, which may include bromide ions and free radicals, can be particularly harsh, resulting in particles generated by the interaction of the plasma with materials within the processing chamb...

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Problems solved by technology

[0004] by Al 2 o 3 , AlN, SiC, Y 2 o 3 , quartz and ZrO 2 The resulting plasma spray coating reduces particle generation from chamber components, but this plasma spray coating cannot penetrate and coat high aspect ratio features such as the holes of the showerhead

Although some deposition techniques are capable of coating high aspect ratio features, the resulting coatings may erode and form grains in certain plasma environments (e.g., bromine-containing plasmas) or suffer from insufficient interdiffusion in the coating. mechanical separation of the layers

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