Manufacturing method of nano-channel with gradually-changed size

Abstract

The invention provides a manufacturing method of a nano-channel with a gradually-changed size. The manufacturing method comprises the following steps: manufacturing a nano-line structure template: coating a photoresist I on the surface of one side of a quartz glass substrate I; carrying out holographic exposure and development after exposure is finished until a nanowire structure appears in the photoresist I; carrying out ion beam etching on the developed photoresist I under protective gas, and removing the photoresist after etching to obtain a nanowire structure template; carrying out Nanoimprint lithography on a nano line structure on the nanoimprint transfer template: coating photoresist II on a quartz glass substrate II; coating the nano-line structure template with a release agent, pressing the nano-line structure template into the photoresist II, and carrying out ultraviolet exposure until the nano-line structure on the template is transferred to the photoresist II; after transfer is completed, modifying and curing the photoresist II, and removing the nanowire structure template ; dividing a nanowire structure region on a nanowire structure substrate into a plurality of parts, and silicon dioxide thin film deposition is carried out one by one according to a gradual change angle in sequence.

Description

technical field [0001] The invention relates to a method for manufacturing a nanochannel, in particular to a method for manufacturing a nanochannel with a gradient size. Background technique [0002] The micro-nanofluidic chip can shrink the basic operations involved in the fields of biology and chemistry, such as sample preparation, biochemical reaction, separation, detection, etc., onto a substrate with a size of tens of square centimeters. By designing an appropriate micro-nano channel structure, the fluid can flow in a certain way in the channel, so that the chip can obtain specific functions as a whole. However, as the size of the channel decreases, the influence of the size effect will increase, and the fluid in the micro-nano channel will have some specific properties different from the macroscopic fluid. For example, when the channel size reaches the nanoscale, quantum effects, interface effects, and nanoscale effects cannot be ignored. Therefore, fluidic systems b...

AI Technical Summary

Problems solved by technology

[0005] In view of this, it is necessary to address the existing problems in the fabrication process of nanochannels and provide a method for fabricating nanochannels with graded sizes

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