Quality monitoring controller for bonding equipment and lumped control method thereof
A technology for quality monitoring and control methods, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problem of inability to meet precision and high-speed bonding requirements, aggravate the performance gap of the whole machine process system, and difficult to meet high-speed wire bonding, etc. problems, to achieve the effect of low system development difficulty, shortened development cycle, cost-effective and reliable effect
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Embodiment 1
[0040] Embodiment 1 is a quality monitoring controller for bonding equipment disclosed by the present invention, referring to figure 1 , including third-party slave modules for high-speed cooperation between various process modules. The third-party modules include microcontrollers, and the model of the microcontroller is embedded Cortex-M4. The third-party slave station module communicates with the operation control planner in real-time EtherCAT, the operation control planner communicates with the servo controller in real-time EtherCAT, and the operation control planner communicates with the PC through the Ethernet network port.
[0041] The third-party slave station module has built-in FS force sensor interface, Z encoder interface, USG ultrasonic interface, EFO high-voltage ignition interface, WCL clamp interface, LED light source interface and real-time communication interface to obtain process data of each process module, so that High-speed cooperation between various proc...
Embodiment 2
[0055] Embodiment 2, a kind of lumped control method of the quality monitoring controller that bonding equipment is used, refer to figure 1 , including the third-party slave station module to obtain the process data of each process module through the FS force sensor interface, Z encoder interface, USG ultrasonic interface, EFO high-voltage ignition interface, WCL clamp interface and LED light source interface, and then through the COE protocol to collect The process data of each process module is converted into real-time control parameters and mapped into the operation control planner, and the data in the operation control planner is updated in real time.
[0056] The process data of each process module is transmitted to the third-party slave station module through the CAN interface or BISS interface, and the third-party slave station module converts the process data of various process modules into real-time control parameters through the COE protocol and maps them to the opera...
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