Metal foil winding type vacuum coating continuous production line

Abstract

The invention relates to a metal foil winding type vacuum coating continuous production line. The continuous production line comprises a coating chamber, the coating chamber is divided into a front section and a rear section, windows are correspondingly disposed on one sides of cavities at the front section and the rear section, and rails perpendicular to racks are arranged on one sides of the racks corresponding to the windows; a planar rectangular cathode arc source device is disposed in the front section, and comprises a target material and a moving trolley, and the target material is fixedon a vertical panel of the moving trolley and is positioned in a supporting drawer box; the moving trolley walks on the vertical rail, a sealing door bracket composed of a frame and a vertical panelis arranged on the moving trolley, a side of the vertical panel facing the window is a seal surface and is in seal design correspondingly with a window frame of the window, and a groove-shaped supporting drawer extending to the window is fixed on the vertical panel. A rotary columnar medium-frequency magnetron sputtering target device is disposed in the rear section, and comprises a sputtering target and a moving trolley assembly, the sputtering target is fixed on the vertical panel and is located in the supporting drawer box; and the target material and the sputtering target are respectivelypushed into or pulled out of each chamber by the moving trolley. The coating layer is uniform and stable in color, and the technological process is reliable.

Description

technical field [0001] The invention relates to a vacuum coating equipment, in particular to a continuous production line of metal foil tape winding vacuum coating which adopts planar rectangular cathodic arc source deposition. Background technique [0002] After years of development of PVD technology, winding-type vacuum coating equipment has developed rapidly in recent years, and winding-type vacuum coating has been widely used. In the early days, the roll-to-roll vacuum coating equipment was mainly used for the vacuum aluminum coating of the whole roll of plastic film, and it was mostly used in the packaging field. After continuous technological progress, the winding vacuum coating has been applied to the production of SiO2, ITO film, dielectric film and so on. Roll-to-roll coating is a high-speed, high-efficiency continuous coating production method. Tons of reconstituted plastic films are unwound from one end to the other, and the film passes through the coating area a...

AI Technical Summary

Problems solved by technology

At present, there are more prominent problems: such as the unsatisfactory uniformity and stability of the ion plating color of the whole roll of metal foil, the poor firmness and reliability of the coating bonding force of the whole roll of foil, etc.

[0012] 1. There is no special glue removal process before the heating chamber. Since the surface of the polished foil is pasted with protective paper, there will be residual glue after tearing. It is best to have means to remove it before the foil heating process to improve the coating quality. The existing glow discharge argon plasma etching effect is not good enough;

[0013] 2. Plasma bombardment etching relies on multiple small arc targets to emit plasma overlapping each other to compensate and it is difficult to obtain good uniformity;

[0014] 3. Reactive ion coating adopts multiple small circular cathode arcs arranged in an array, and the coating color is not uniform and stable enough, and the process is not reliable enough;

[0015] 4. There is no online real-time monitoring device for the L*a*b* value and color difference of the coating color in the horizontal and vertical directions of the foil strip, and the coating process parameters cannot be corrected in time according to the real-time displayed color difference to ensure color uniformity and consistency

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