Electro-optical modulator based on silicon and phase change material groove type composite waveguide

Abstract

The invention discloses an electro-optical modulator based on a silicon and phase change material groove type composite waveguide, which is characterized by comprising a silicon substrate, a silicon dioxide layer and a silicon film base stacked in sequence from bottom to top, wherein an input waveguide, a mixed waveguide and an output waveguide which are connected in sequence are arranged on the silicon film base in the horizontal direction; the silicon film base comprises two undoped silicon film regions which are arranged symmetrically, two heavily doped silicon film regions which are arranged symmetrically and located between the two undoped silicon film regions, and a lightly doped silicon film region which is located between the two heavily doped silicon film regions; the input waveguide and the output waveguide are positioned in the center of the top surface of the undoped silicon film region; the mixed waveguide is located in the center of the top surface of the lightly doped silicon film region; the mixed waveguide is composed of a phase change material GST arranged in the horizontal direction and silicon waveguides symmetrically arranged on the two side surfaces of the phase change material GST; and a metal contact is arranged on the top surface of the heavily doped silicon film. The electro-optical modulator based on the silicon and phase change material groove type composite waveguide has the advantages of compact structure, small driving voltage, high extinction ratio and low power consumption.

Description

technical field [0001] The invention relates to an electro-optic modulator, in particular to an electro-optic modulator based on a slot-type composite waveguide of silicon and phase-change materials. Background technique [0002] With the continuous improvement of people's requirements for information processing speed, data transmission rate and data storage capacity, the information network is growing at an explosive rate. In order to meet the needs of large-capacity and ultra-high-speed information interconnection, electro-optical signal processing devices with superior performance are often required. Electro-optic modulator, as the core device to realize the conversion of information between electrical signal and optical signal in optical communication transmission, has broad development and application prospects, and has aroused great interest of researchers. [0003] Since GST (Ge 2 Sb 2 Te 5 ) Phase change materials have been widely used in electronics, physics, ma...

AI Technical Summary

Problems solved by technology

Existing electro-optic modulators based on phase change materials have disadvantages such as high insertion loss, low extinction ratio, and high energy consumption when phase change occurs.

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