Magneto-rheological polishing device and polishing method for dynamic magnetic field

Abstract

The invention relates to the technical field of ultraprecision machining, in particular to a magneto-rheological polishing device and polishing method for a dynamic magnetic field. The magneto-rheological polishing device for the dynamic magnetic field comprises a base, a polishing disk, a dynamic magnetic field generation assembly, a workpiece clamping assembly, an ultrasonic assembly, a first driving assembly and a second driving assembly, wherein the workpiece clamping assembly is mounted on the base and is arranged above the polishing disc, the polishing disc is connected to the first driving assembly, the dynamic magnetic field generation assembly is connected to the second driving assembly and is arranged below the polishing disc, the first driving assembly and the second driving assembly are mounted on the base, the ultrasonic assembly is mounted on the lateral part of the polishing disc, and a magneto-rheological polishing solution is contained in the polishing disc. A magneticchain string is rearranged by means of the dynamic magnetic field, so that a grinding material is updated and self-sharpened. A chemical reaction is fuller by means of an ultrasonic assistant chemical reaction. As a clamping disc revolves and rotates, a workpiece is in full contact with the magneto-rheological polishing solution, so that the polishing efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision machining, and more specifically, to a dynamic magnetic field magnetorheological polishing device and a polishing method. Background technique [0002] With the increasingly widespread application of optoelectronic and microelectronic devices, higher requirements are put forward for the quality of related components. It is necessary to maximize the processing quality in the processing process. Magnetorheological polishing technology is a new type of polishing technology based on the magnetorheological effect. The optical surface processing method, the processing process is to use the high viscosity and low fluidity "flexible polishing film" formed by the magnetorheological working fluid under the high gradient magnetic field to remove the surface material of the workpiece in a small amount, with no subsurface damage, It is suitable for curved surface processing and other advantages that tr...

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Problems solved by technology

However, because the traditional magnetorheological polishing belongs to point contact polishing, it is necessary to control the polishing wheel to scan along the workpiece surface according to a certain trajectory to realize the processing of the entire surface, resulting in low polishing efficiency. Certain measures need to be taken to improve the efficiency of magnetorheological polishing

[0003] Chinese patent CN200610132495.9 proposes a grinding and polishing method based on the magnetorheological effect, but due to the magnetorheological effect of the static magnetic field, the polishing pad lacks the mechanism of self-dressing and self-sharpening of the abrasive, and the magnetorheological fluid under the action of the magnetic field The viscoelasticity makes the polishing pad formed by the static magnetic field force and distort the surface of the workpiece after processing, making it difficult to keep the performance of the processed workpiece stable; Chinese patent CN201710085353. If the damage is extremely small, it will take a long time to remove it only by the mechanical action of magnetorheological polishing; a cam-driven magnet type magnetorheological fluid dynamic pressure polishing device and polishing method proposed in Chinese patent CN201710094137.1 are due to the use of Because the magnets that generate the magnetic field are difficult to disassemble, it is difficult to clean the polishing disc, which affects the next polishing to a certain extent

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