Sum frequency device and laser

A frequency-doubled light and frequency-triple technology, applied in the optical field, can solve the problems of low work efficiency, narrow selection range, limited application, etc., and achieve the effect of improving work efficiency and stable and efficient output.

Inactive Publication Date: 2020-05-05
RAINBOW SOURCE LASER RSLASER
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are defects in this sum-frequency scheme. The main defect is that, since the 266nm quadruple laser is involved, the selection range of crystals

Method used

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  • Sum frequency device and laser
  • Sum frequency device and laser
  • Sum frequency device and laser

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 1 As shown, this embodiment provides a sum frequency device, which includes a main optical path 10 , a double frequency optical branch 20 , a triple frequency optical branch 30 and a beam combining optical path. A beam expander 1 , a frequency doubling crystal 2 , a frequency tripler crystal 3 , a second beam splitting device 7 and a first beam splitting device 6 are sequentially arranged on the main optical path 10 . The double frequency optical branch 20 and the triple frequency optical branch 30 are formed after beam splitting by the first beam splitter 6 . The triple frequency optical branch 30 is provided with an adjustment reflector 19 . The double frequency optical branch 20 is sequentially provided with an optical path compensation device, a half-wave sub-wave plate 13 and a polarizing plate 15 . The optical path of the triple frequency optical branch 30 and the double frequency optical branch 20 are the same. The frequency doubled optical bran...

Embodiment 2

[0046] The difference between this embodiment and Embodiment 1 is that this embodiment provides a laser, including the sum frequency device, the laser includes a seed laser module and a sum frequency device, a laser module is arranged inside the laser, and a laser module is placed at the light outlet of the laser and frequency device. The beneficial effect of the laser is that it can efficiently provide laser with five times frequency.

Embodiment 3

[0048] The difference between this embodiment and the above embodiments is that, specifically, LBO is a nonlinear optical crystal with excellent performance. LBO crystal has a high optical damage threshold, moderate nonlinear coefficient, stable chemical properties, high mechanical hardness, and the product Due to its wide application range, LBO is used for frequency doubling involving double-frequency light and triple-frequency light.

[0049] When using LBO for frequency doubling, here we use the type I phase matching of the LBO crystal, and set the temperature to 149°C. The main purpose is to keep the fundamental frequency light and the frequency doubled light from leaving after passing through the LBO.

[0050] When the temperature is 149°C, the angle tolerance and acceptance angle range of the corresponding crystal are very large, which has a very large tolerance to the laser, and the crystal has a very high frequency doubling efficiency.

[0051] Since the repetition fre...

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Abstract

The invention provides a sum frequency device which comprises a main optical path, a quintuple frequency crystal and a beam combining device. A double-frequency crystal, a triple-frequency crystal anda first beam splitting device are sequentially arranged on the main optical path. Two optical branches, namely a double-frequency optical branch and a triple-frequency optical branch, can be formed through the first beam splitting device. A wave plate and a polarizing film are sequentially arranged on the double-frequency optical branch, and the optical paths and the end points of the double-frequency optical branch and the triple-frequency optical branch are the same. The beam combining device combines the light in the double-frequency optical branch and the light in the triple-frequency optical branch. The combined light can be propagated to a quintuple-frequency crystal. The invention further provides a laser. Compared with the prior art, the device has the beneficial effects that thesum frequency working efficiency can be improved, and the quintuple-frequency laser can be efficiently obtained.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to a sum frequency device and a laser. Background technique [0002] In the field of laser applications, 213nm deep ultraviolet solid-state lasers are mainly used for on-line monitoring equipment for wafer defects, in which the laser with a wavelength of 213nm is generated by a laser with a wavelength of 1064nm after multiple times of frequency doubling and summing. [0003] In the prior art, generally, the fundamental frequency light and the quadrupling frequency are summed to obtain 213nm laser light. However, this sum-frequency solution has defects. The main defect is that, since it involves a 266nm quadruple laser, the selection range of crystals and coating products in the laser is relatively narrow, and the work efficiency is not high. Therefore, the application of this sum-frequency scheme is limited. [0004] Therefore, it is necessary to design another device for generat...

Claims

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Application Information

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IPC IPC(8): H01S3/108H01S3/109H01S3/30
CPCH01S3/108H01S3/109H01S3/30
Inventor 王家赞朱光
Owner RAINBOW SOURCE LASER RSLASER
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