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A chemical polishing method to improve the uniformity of the inner hole of the laser gyroscope cavity

A laser gyro, chemical polishing technology, applied in the field of chemical polishing, to solve the uneven phenomenon, meet the requirements of high precision, and improve the quality of the polished surface

Active Publication Date: 2021-08-13
NO 717 INST CHINA MARINE HEAVY IND GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Based on this, it is necessary to provide a chemical polishing method to improve the uniformity of the inner hole of the laser gyro cavity, which can effectively solve the uneven phenomenon caused by the solution gradient on the surface of the hole wall without using a corrosion-resistant pump to drive the flow of polishing liquid, and meet the High precision requirements for laser gyroscope cavity discharge circuit

Method used

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  • A chemical polishing method to improve the uniformity of the inner hole of the laser gyroscope cavity
  • A chemical polishing method to improve the uniformity of the inner hole of the laser gyroscope cavity
  • A chemical polishing method to improve the uniformity of the inner hole of the laser gyroscope cavity

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Embodiment 1

[0031] This embodiment provides a chemical polishing method for improving the uniformity of the inner hole of the laser gyro cavity, including the following steps:

[0032] 1) Cavity preparation:

[0033] Place the cavity of the laser gyro to be polished in gasoline, acetone, and absolute ethanol in sequence, and ultrasonically clean it at room temperature for 5-10 minutes, take out the cavity, and dry it in the air. Then pre-protect all non-corroded areas of the laser gyro cavity to be polished (referred to as "non-corroded areas") with adhesive tape to ensure that the inner holes to be corroded are fully exposed, and the cavity is pre-protected.

[0034] 2) Corrosion:

[0035] Prepare the corrosion solution according to hydrofluoric acid, nitric acid and deionized water with a volume ratio of 1:1.5:1. Soak the pre-protection cavity in the corrosive solution to drive away the air bubbles in the inner hole; then vertically suspend the pre-protection cavity on the V-shaped to...

Embodiment 2

[0043] This embodiment provides a chemical polishing method for improving the uniformity of the inner hole of the laser gyro cavity, including the following steps:

[0044] 1) Cavity preparation:

[0045] Place the cavity of the laser gyro to be polished in gasoline, acetone, and absolute ethanol in sequence, and ultrasonically clean it at room temperature for 5-10 minutes, take out the cavity, and dry it in the air. Then pre-protect all non-corroded areas of the laser gyro cavity to be polished (referred to as "non-corroded areas") with adhesive tape to ensure that the inner holes to be corroded are fully exposed, and the cavity is pre-protected.

[0046] 2) Corrosion:

[0047] Prepare the corrosion solution according to hydrofluoric acid, hydrochloric acid and deionized water with a volume ratio of 1:2:2. Soak the pre-protection cavity in the corrosive solution to drive away the air bubbles in the inner hole; then vertically suspend the pre-protection cavity on the polytet...

Embodiment 3

[0055] This embodiment provides a chemical polishing method for improving the uniformity of the inner hole of the laser gyro cavity, including the following steps:

[0056] 1) Cavity preparation:

[0057] Place the cavity of the laser gyro to be polished in gasoline, acetone, and absolute ethanol in sequence, and ultrasonically clean it at room temperature for 5-10 minutes, take out the cavity, and dry it in the air. Then pre-protect all non-corroded areas of the laser gyro cavity to be polished (referred to as "non-corroded areas") with adhesive tape to ensure that the inner holes to be corroded are fully exposed, and the cavity is pre-protected.

[0058] 2) Corrosion:

[0059] Prepare the corrosion solution according to the volume ratio of hydrofluoric acid, sulfuric acid and deionized water in a volume ratio of 8:1:11. Soak the pre-protection cavity in the corrosive solution to drive away the air bubbles in the inner hole; then vertically suspend the pre-protection cavity...

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Abstract

The invention relates to a chemical polishing method for improving the uniformity of the inner hole of a laser gyroscope cavity, which comprises the following steps: pasting an adhesive tape on the non-corrosion area of ​​the laser gyroscope cavity to be polished to form a pre-protected cavity; Suspend in the corrosion solution and ensure that the inner hole to be corroded is fully exposed. The total corrosion time is regarded as a corrosion cycle, and the cavity is rotated 90° in the same clockwise direction every 1 / 4 corrosion cycle to obtain the corrosion cavity; among them, The corrosion solution is hydrofluoric acid / nitric acid aqueous solution, hydrofluoric acid / hydrochloric acid aqueous solution or hydrofluoric acid / sulfuric acid aqueous solution; the corrosion cavity is dipped in the neutralizing solution, and then washed with water; dried to obtain the product. This chemical polishing method can effectively solve the uneven phenomenon caused by the solution gradient on the surface of the hole wall without using a corrosion-resistant pump to drive the flow of polishing liquid, ensure the consistency of the corrosion state of the inner hole wall, and meet the discharge requirements of the laser gyro cavity. High precision requirements of the circuit.

Description

technical field [0001] The invention relates to the field of chemical polishing, in particular to a chemical polishing method for improving the uniformity of the inner hole of a laser gyroscope cavity. Background technique [0002] The laser gyro cavity is a kind of glass-ceramic optical element with microporous structure and complex structure. In order to obtain a high-precision laser gyroscope, the requirements for the uniformity of the inner hole diameter and the surface roughness of the cavity discharge circuit are extremely high. After the glass-ceramic is drilled and milled, the hole wall in the cavity will have residual machining damage layer and processing stress. The hole wall in the cavity must be chemically polished to remove the damage layer and residual stress. [0003] The chemical polishing process generally uses hydrofluoric acid etching solution to etch the inner hole of the cavity, and it is expected to obtain inner holes with good smoothness and uniformit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F3/00
CPCC23F3/00
Inventor 王潺聂俊卿杨长城熊长新刘军汉
Owner NO 717 INST CHINA MARINE HEAVY IND GRP