An electro-optic modulator based on a low-refractive index polymer photonic crystal microcavity
A photonic crystal microcavity, electro-optical modulator technology, applied in the field of optical communication, can solve problems such as unfavorable on-chip integration, uncompact structure, signal distortion, etc., and achieve the effects of favorable on-chip integration, compact structure and low cost
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[0034] In order to facilitate those of ordinary skill in the art to understand and implement the present invention, the present invention will be further described in detail and in-depth below in conjunction with the accompanying drawings.
[0035] The present invention proposes for the first time an electro-optic modulator based on a polymer-on-insulator (Polymer-on-Insulator) one-dimensional photonic crystal nanobeam cavity, the refractive index ratio of the polymer material and the substrate material is as low as 1.17, and the modulation efficiency is as high as 16pm / V , the modulation bandwidth can reach 78GHz, and the device length is only 80μm, and the half-wave voltage product is as low as 0.05V cm; it can be used in optical communication, electric field sensing and tunable photonic devices and other fields, and has high application value.
[0036] The electro-optic modulator such as figure 1 As shown, from bottom to top: the bottom layer of silicon dioxide substrate, t...
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