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Method and apparatus for removing hydrogen peroxide

A hydrogen peroxide, hydrogen oxide technology, applied in chemical instruments and methods, physical/chemical process catalysts, organic compound/hydride/coordination complex catalysts, etc., can solve problems such as catalyst performance degradation and prolong the effective period. Effect

Active Publication Date: 2020-05-19
KURITA WATER INDUSTRIES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] Through this hydrogen peroxide decomposition treatment, the concentration of hydrogen peroxide in the treated water can be reduced to be lower than the target concentration (for example, 1ppb), but the performance of the catalyst will gradually decrease with long-term use

Method used

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  • Method and apparatus for removing hydrogen peroxide
  • Method and apparatus for removing hydrogen peroxide
  • Method and apparatus for removing hydrogen peroxide

Examples

Experimental program
Comparison scheme
Effect test

reference example 1

[0071] Prepared as an ultrapure water production device image 3 device shown. This ultrapure water production device 81 is constituted by three stages of a pretreatment device 82 , a primary pure water production device 83 , and a secondary pure water production device (subsystem) 84 . In the pretreatment device 82 of the ultrapure water production device 81 , filtration of the raw water W, coagulation sedimentation, and pretreatment with a microfiltration membrane are performed.

[0072] The primary pure water production device 83 has a tank 85 for pretreatment water W1, a reverse osmosis (RO) membrane device 86, an ultraviolet (UV) oxidation device 87, and a regenerative ion exchange device (mixed-bed type or 4-bed 5-tower type, etc.) 88 , Membrane degassing device 89.

[0073] The sub-system 84 is composed of a sub-tank 91 for storing the primary pure water W2 produced by the primary pure water production device 83, and an ultraviolet oxidizer for treating the primary pu...

reference example 2

[0081] In Reference Example 1, the used resin in the platinum group metal catalyst resin tower 93 after long-term operation was taken out and filled into a test column to prepare a test platinum group metal catalyst resin tower. In addition, for comparison, a new product resin was also filled in a test column to prepare a platinum group metal catalyst resin tower.

[0082] Add 300μg / L or 1000μg / L hydrogen peroxide to ultrapure water (hydrogen peroxide less than 1μg / L) to prepare the inlet water for the test, and measure the inlet water for the test at a water flow rate (SV) of 300hr -1 The concentration of hydrogen peroxide in the outlet water after passing down through each of the test columns mentioned above. The results are shown in Table 2.

[0083] [Table 2]

[0084]

[0085] As can be seen from Table 2, the outlet water hydrogen peroxide concentration of the used resin in the platinum group metal catalyst resin tower 93 after long-term operation was higher than that...

reference example 3

[0087] In Reference Example 1, the used resin in the platinum-group metal catalyst resin tower 93 after long-term operation was filled into a test column to prepare a test platinum-group metal catalyst resin tower. In addition, for comparison, a new product resin was also filled in a test column to prepare a platinum group metal catalyst resin column.

[0088] Add 30 μg / L hydrogen peroxide to ultrapure water (hydrogen peroxide less than 1 μg / L) to prepare inlet water, and measure the inlet water at a water flow rate (SV) of 400 hr -1 The concentration of hydrogen peroxide (No. 1) in the outlet water after passing down through each of the above test columns. The results are shown in Table 3.

[0089] In addition, as a load test, 400 μg / L hydrogen peroxide was added to ultrapure water (hydrogen peroxide less than 1 μg / L) to prepare inlet water for the test, and the inlet water for the test was fed at a water flow rate (SV) of 6400 hr. -1 After 22 hours of downward passage into...

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Abstract

A method and an apparatus both for decomposing and removing hydrogen peroxide by flowing water containing hydrogen peroxide through columns 21 to 25 each filled with a platinum-based catalyst, whereinthe hydrogen peroxide removal performance can be recovered by halting the flowing of the water through one or some of the columns at a predetermined point of time and storing the platinum-based catalyst in the columns in ultra-pure water. It is possible to flow a nitrogen gas or hydrogen-dissolved water through the columns through which the flowing of the water is halted at the predetermined point of time, and it is also possible to increase the volume of the water to be flowed through the other columns.

Description

technical field [0001] The invention relates to a method and a device for removing hydrogen peroxide in water in a pure water manufacturing process. Pure water in the present invention includes ultrapure water. Background technique [0002] The ultrapure water used for washing semiconductor / electronic materials is treated with raw water (industrial water, tap water, well water) by an ultrapure water manufacturing facility consisting of a pretreatment device, a primary pure water manufacturing device, and a secondary pure water manufacturing device (subsystem). etc.) and manufactured. [0003] Suspended substances or colloidal substances in raw water are removed in the pretreatment device consisting of coagulation, pressurized flotation (sedimentation), filtration (membrane filtration) devices, etc. In addition, it is also possible to remove high-molecular organic substances, hydrophobic organic substances, etc. in this process. [0004] In primary pure water production eq...

Claims

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Application Information

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IPC IPC(8): C02F1/58B01J31/28B01J31/40B01J38/48C02F1/20
CPCB01J31/28B01J31/40B01J38/48C02F1/20C02F1/58C02F1/725C02F2103/04
Inventor 森田博志港康晴
Owner KURITA WATER INDUSTRIES LTD