Method for ultrasonic cavitation assisted ultrasonic magnetic polishing of micro-structure mold

Abstract

The invention discloses a device and method for double-ultrasonic-assisted magnetic polishing of a micro-structure mold. It can be ensured that a polished area generates a sufficient ultrasonic cavitation phenomenon and increases polishing pressure by independently arranging an ultrasonic vibration device generating an ultrasonic cavitation effect. Meanwhile, due to the fact that the micro-structure mold is completely soaked in polishing liquid, nano SiO2 particles in the polishing liquid also achieve a certain polishing effect on mold materials and are beneficial to removing the mold materials, and polishing surface quality is improved. In addition, unlike the prior art that an ultrasonic main shaft of a machine tool is perpendicular to the surface of a workpiece to be polished, an ultrasonic main shaft of a machine tool is arranged parallel to the surface to be polished of the micro-structure mold, polishing machining is carried out through the circumferential surface of an annular permanent magnet, and the tangential linear speed of the whole polishing machining area is consistent from the center to the edge, so that the polishing machining speed is increased, and the machiningefficiency is improved.

Description

technical field [0001] The invention relates to a device and method for double-ultrasonic-assisted magnetic polishing of a microstructure mold, belonging to the field of precision manufacturing, and specifically relates to a microstructure mold precision polishing process method and a realization device. Background technique [0002] Microstructured optical components are widely used in the fields of national defense and military, mechatronics, optics and optoelectronics, such as the microlens array backlight module in the liquid crystal display screen of mobile phones, computers and other electronic equipment, which can make the display screen obtain bright and uniform Display effect; optical fiber connectors and micro sensors in the field of mechanical electronics, shadowless lamps in the field of biomedicine, large-aperture zone plates in military satellite imaging systems, and guidance systems in missiles. At present, people's demand for microstructured optical component...

AI Technical Summary

Problems solved by technology

However, since most of the microstructure molds used for molding optical components are hard alloys, the material properties of which are completely different from those of the aforementioned hard and brittle materials, the traditional ultrasonic magnetorheological composite polishing method for grinding and polishing the microstructure molds cannot achieve The ideal polishing effect cannot meet the high-quality processing needs of microstructured mold surfaces

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