Vertical cavity surface emitting laser with composite passivation layer and method of making same

Abstract

The invention provides a vertical cavity surface emitting laser with a composite passivation layer and a manufacturing method of the vertical cavity surface emitting laser. The vertical cavity surfaceemitting laser comprises a multi-layer structure. The multilayer structure at least comprises a substrate (10), a first mirror layer (20) arranged above the substrate (10), an active region (30) arranged above the first mirror layer (20) and a second mirror layer (40) arranged above the active region (30); the first mirror layer (20), the active region (30) and the second mirror layer (40) are subjected to side etching and side oxidation; the vertical cavity surface emitting laser further comprises a composite passivation layer (50); the composite passivation layer (50) is used for wrapping the surfaces, making contact with air, of the second mirror layer (40) and the active region (30); and the composite passivation layer (50) comprises at least two layers of dielectric materials. According to the invention, surface passivation can be realized; the anti-reflection effect is improved; laser is prevented from returning to the active region to the greatest extent; and the active regionis protected.

Description

technical field [0001] The invention relates to the field of semiconductor chips, in particular to a vertical cavity surface emitting laser with a composite passivation layer and a manufacturing method thereof. Background technique [0002] Because in the process of fabricating a vertical cavity surface emitting laser, it is first necessary to isolate the active region to precisely define the size of its resonant cavity. There are a large number of unpaired bonds (danglingbond) on the sidewalls produced during the etching process, so the usual method is to use dry plasma etching technology to form a cylindrical platform, so that the unpaired bonds can be coated with coating technology. overlay to increase the operating lifetime of subsequent devices. The passivation layer of the active region of the existing vertical cavity surface emitting laser is mainly covered by SiOxNy formed by PECVD and ALD, but its coverage and film thickness accuracy are relatively low, and the dep...

AI Technical Summary

Problems solved by technology

[0006] The three patents mentioned above did not consider the effect of higher reflectance corresponding to a larger difference in refractive index between different material interfaces. If the refractive index is gradually changed, the light transmittance of the light window can be effectively improved, and at the same time it can achieve Good device protection effect

Images