Semiconductor device and method of manufacturing such a device
A technology of semiconductors and devices, applied in the field of semiconductor devices, capable of solving problems such as effective resistance reduction
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[0053] Figure 1A -B is a schematic cross-sectional view perpendicular to the thickness direction of the semiconductor device according to the present invention. The semiconductor device 10 comprises a semiconductor body 1 with a p-type silicon semiconductor substrate 2 which, in the present embodiment, has a resistivity of 2-4 KΩcm.
[0054] A 100-nm low-stress PECVD SiC film was disposed on a p-type high-resistivity substrate (HRS). The SiC film provides HRS surface passivation before the device integration process flow, ie equivalent to the original wafer in standard silicon processes.
[0055] A Novellus Concept One PECVD system was used to deposit amorphous SiC films. The main deposition parameters used for SiC deposition are: SiH at 400 °C, 2.25 Torr, and 100 sccm gas flow 4 and 3000sccm CH 4 , and a power of 1000W (HF=500W; LF=500W). The deposition rate of SiC using the above deposition parameters was 670 Angstroms / minute with a uniformity of about 1%. A refractive...
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