Method and device for manufacturing micro-fluidic chip with femtosecond plasma grating

Abstract

The invention discloses a method and device for manufacturing a micro-fluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse lasersact on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, pulses of two beams of light interfere; under the constraint of an interference field, only one filament is formed in a place where interference is constructive; and multiple filaments are arranged equidistantly in space to form the plasma grating; andthe device for manufacturing the micro-fluidic chip comprises a plasma grating light path, a micro-channel processing platform and a hydrofluoric acid ultrasonic pool. Compared with the prior art, themethod and the device have the advantages of increasing the manufacturing speed of the quartz glass micro-fluidic chip and improving the roughness quality of a micro-channel wall surface; especiallythe micro-fluidic chip of a three-dimensional structure can be conveniently processed; a new preparation method is provided for manufacturing of micro-channel chips, and the new preparation has uniqueadvantages especially in processing the micro-fluidic chip with an ultrafast optical technology.

Description

technical field [0001] The invention relates to the technical field of microchannel chip manufacturing, in particular to a microfluidic chip and a device thereof manufactured by using a femtosecond plasma grating. Background technique [0002] The microfluidic chip based on microfluidic technology can integrate sample collection, transfer, dilution, reaction, separation, detection and other functions on micro-scale materials. The consumption of reagents is therefore widely used in medicine, biology, chemistry, materials, etc. and their cross fields. The structure of the microchannel in the microfluidic chip is individually designed according to the application requirements, and consists of various independent microchannels and conduits between the microchannels. With the development of microfluidic technology, highly integrated and highly automated microfluidic chips are becoming increasingly important in biochemical reaction experiments. [0003] At present, the manufactu...

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Problems solved by technology

[0004] Chinese patent document CN 101101356A describes that the use of femtosecond lasers can effectively process microfluidic optical waveguides on quartz glass substrates. However, in this method, sputtered particles are easily attached to the objective lens during processing, causing a reduction in processing efficiency, and There is a certain degree of randomness in the regularity of the shape of the groove

The "thickening" and irregular distribution of the diameter of the light filament is not conducive to the fine processing of femtosecond laser

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