A mems lens driver

Abstract

The invention discloses a MEMS lens driver, which comprises a support frame with an opening at the top, a permanent magnet is arranged at the central part of the inner bottom of the support frame, a lens support frame is coaxially arranged at the inner upper part of the support frame, and the lens support frame and the support frame A spring is connected between them, an optical lens is arranged at the upper center of the lens support frame, and a drive coil assembly is provided on the top surface of the lens support frame, and the drive coil assembly includes two transverse drive coils, two longitudinal drive coils and a ring drive coil, the ring The driving coil is arranged around the outside of the optical lens along the circumferential direction. The MEMS lens driver of the present invention uses electromagnetic drive as the driving mode, which can realize anti-shake in the X, Y, and Z directions of the optical lens, better adjust the position of the optical lens, and realize the functions of focusing and collecting images of the optical lens. The anti-shake response time is short, the cost is low, the driving voltage is low, the driving displacement is large, the anti-shake, drop-proof and shock-proof, simple structure, and convenient to use.

Description

technical field [0001] The invention relates to a MEMS lens driver, which belongs to the field of micro-electromechanical and optical technologies. Background technique [0002] MEMS (Micro Electro-Mechanical System) refers to a system developed on the basis of integrated circuit technology, which integrates micro-sensors, micro-mechanisms, micro-actuators, signal processing and control circuits, communication interfaces, and power supplies. A mechanical device or system with a specific function. At present, MEMS technology has been widely used in aerospace, automobile industry, biomedicine, communication and other fields due to its characteristics of miniaturization, integration, diversification, and intelligence, and is gradually developing towards smaller size. Micro actuator (Micro Actuator) is the core component of MEMS. It is a micro-device that can output physical quantities such as force, torque, and displacement. It can convert various forms of energy such as light...

AI Technical Summary

Problems solved by technology

The Chinese patent "CN201920281755.1 An optical anti-shake MEMS driver" adopts the principle of sensor displacement, controls the movement of the image sensor through the MEMS electrostatic driver installed under the image sensor, and makes it translate and rotate to compensate for the shaking of the mobile phone, but This patent adopts electrostatic drive, which has high drive voltage, high cost and high power consumption; Chinese patent "CN201910038259.8 A MEMS scanning mirror" adopts piezoelectric drive, and by applying the opposite voltage, the torsion beam drives the deflection of the reflective mirror, but Limited by the driving mode, the deflection angle of the mirror is affected; in the Chinese patent "CN201910839155.7 A MEMS Scanning Mirror", a potential difference is applied between the fixed comb and the movable comb to make the movable comb tilt, and the torsion beam drives the Mirror deflection, but this patent adopts electrostatic drive, and the drive voltage is relatively large

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