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Cracking Process of Chlorosilane High Boilers Produced by Polysilicon Production

A technology of high boilers and chlorosilanes, which is applied in the field of pyrolysis process of polysilicon production by-product chlorosilane high boilers, can solve the problems of high cost of cracking catalysts, achieve high compatibility, reduce pyrolysis temperature, and save costs

Active Publication Date: 2021-12-07
CHINA ENFI ENGINEERING CORPORATION +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to provide a cracking process of polysilicon production by-product chlorosilane high boilers to solve the problem of high cost of chlorosilane high boiler cracking catalysts in the prior art

Method used

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  • Cracking Process of Chlorosilane High Boilers Produced by Polysilicon Production

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] refer to figure 1 Do the following.

[0038] Filter 50,000g of polysilicon production by-product chlorosilane high boilers to remove amorphous silicon and obtain purified high boilers, which are filtered by silicon carbide ceramic membrane filter elements with a filtration accuracy of 1 micron; filled in the cracking reactor Catalyst, the catalyst is an organic amine loaded on a macroporous weakly basic polystyrene anion exchange resin, the particle size of the macroporous weakly basic polystyrene anion exchange resin is 0.5-0.7mm, the pore diameter is 50-150nm, and the specific surface area is 30 ~40m 2 / g, the organic amine is a composition composed of tri-n-butylamine, tri-n-octylamine and N, N-dimethylaniline in a weight ratio of 1:0.4:0.7, and the organic amine is in the macroporous weakly basic polystyrene anion The loading on the exchange resin was 1.0%. Preheat the purified high boilers to 60°C and send them into the cracking reactor, and make the purified hi...

Embodiment 2

[0042] The difference from Example 1 is that the organic amine is a composition composed of tri-n-butylamine, tri-n-octylamine and N,N-dimethylaniline in a weight ratio of 1:0.5:0.5

[0043] The weight ratio of silicon tetrachloride in the feed chlorosilane high boiler: trichlorosilane: high boiler is 45:0:55; in the bottom liquid phase product obtained, silicon tetrachloride: trichlorosilane: high boiling The weight ratio of the material is 66:27:9.

Embodiment 3

[0045] refer to figure 1 Do the following.

[0046] The difference from Example 1 is that the organic amine is a composition composed of tri-n-butylamine, tri-n-octylamine and N,N-dimethylaniline in a weight ratio of 1:0.3:0.8.

[0047] The weight ratio of silicon tetrachloride in the feed chlorosilane high boiler: trichlorosilane: high boiler is 45:0:55; in the bottom liquid phase product obtained, silicon tetrachloride: trichlorosilane: high boiling The weight ratio of the material is 65:28:9.

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Abstract

The invention provides a cracking process for polysilicon production by-product chlorosilane high boilers. The cracking process includes: filtering the polysilicon production by-product chlorosilane high boilers to remove amorphous silicon to obtain purified high boilers; using a catalyst to crack hydrogen chloride and purified high boilers to obtain a cracked product system, in which the catalyst Including macroporous resins and organic amines supported on macroporous resins, organic amines are selected from tri-n-butylamine, tri-n-octylamine and N, N-dimethylaniline, dioctadecyl secondary amine and perfluorotriethylamine Any one or more of amines. The framework of the macroporous resin used as a carrier in the catalyst has high compatibility with chlorosilane high boilers to provide more reaction interfaces, and the organic amine loaded on the framework is enriched in the micropores, making the inner and outer surfaces of the resin react more thoroughly, which can improve Conversion rate, lower pyrolysis temperature. The catalyst can be recycled. Before entering the macroporous resin, filter to remove the amorphous silicon in the by-product of polysilicon production, so as to avoid blocking the pores of the resin.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a cracking process for polysilicon production by-product chlorosilane high boilers. Background technique [0002] In the process of producing polysilicon by the improved Siemens method, SiHCl 3 and H 2 The gas enters the reduction furnace in a certain proportion, and the temperature of the silicon core carrier in the furnace reaches above 1050°C, and the SiHCl 3 and H 2 The mixed gas of SiHCl undergoes a reduction reaction on the surface of the carrier 3 +H 2 =Si+3HCl and thermal decomposition reaction 4SiHCl 3 =Si+3SiCl 4 +2H2, the generated silicon is deposited on the surface of the silicon core to form polycrystalline silicon rods. During the reduction process, in addition to silicon, SiCl 4 、SiH 2 Cl 2 、H 2 In addition to the formation of HCl, etc., there is also Si 2 Cl 6 、Si 2 HCl 5 、Si 2 h 2 Cl 4 , Cl 6 OSi 2 and Si 3 Cl 8 A series of b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
CPCC01B33/1071Y02P20/584
Inventor 曾晓国万烨张晓伟张伟严大洲路向飞刘允许
Owner CHINA ENFI ENGINEERING CORPORATION