Iron-cobalt-tantalum alloy sputtering target material and preparation method thereof

Abstract

The invention relates to an iron-cobalt-tantalum alloy sputtering target material and a preparation method thereof. The preparation method comprises the steps of (1) loading iron-cobalt-tantalum alloypowder with a target atomic ratio into a die, then sealing the die, and carrying out tap compaction treatment; (2) degassing the die subjected to the tap compaction treatment; (3) carrying out hot isostatic pressing treatment on the degassed die under 750-900 DEG C to obtain a crude product of the iron-cobalt-tantalum alloy sputtering target material; and (4) machining the obtained crude productof the iron-cobalt-tantalum alloy sputtering target material to obtain the iron-cobalt-tantalum alloy sputtering target. The preparation method has the advantages of simple process, low cost and the like; and in addition, the prepared iron-cobalt-tantalum alloy sputtering target material not only has the density of 98% or above, the bending strength of 700 MPa or above, the magnetic flux of 30% orabove and the oxygen content of 600 ppm or below, but also has good machining performance.

Description

technical field [0001] The invention relates to the field of target material and target material preparation, in particular to an iron-cobalt-tantalum alloy sputtering target material and a preparation method thereof. Background technique [0002] With the rapid development of society and the sharp increase in people's demand for information storage, more and more attention has been paid to recording media such as hard disks and optical discs using magnetic information storage technology, and relying on their advantages such as high storage density, large capacity and low price, It occupies a pivotal position in the field of information storage. Magnetic recording is a way of recording information by using the properties of magnetism. It can input and read information through special methods during storage and use, so as to achieve the purpose of storing information and reading information. According to the position relationship between the magnetization direction of the me...

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Problems solved by technology

The manufacturing method belongs to the vacuum hot-pressing sintering method. Although the process is simple, it is easy to cause the problem of brittleness and hardness of the product, which makes the product hardness very high, which makes the product machining difficult and increases the cost; CN102560219A discloses a new type of vertical magnetic The manufacturing method of the alloy target material FeCoTaZr for the soft magnetic bottom layer of the recording medium comprises preparing four kinds of raw materials of Fe, Co, Ta and Zr; then putting the raw materials into a crucible, carrying out vacuum melting and pouring into ingots; Targets processed into desired shapes

The manufacturing method is a vacuum smelting method. Although the process is simple and the cost is low, it is easy to cause defects such as component segregation, pores, and inclusions in the product.

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