Aluminum oxide ceramic and preparation method thereof

An alumina ceramic and alumina technology, which is applied in the field of ceramics, can solve the problems of inability to meet the requirements of semiconductor equipment, low density of alumina ceramics, and low mechanical strength of ceramics.

Active Publication Date: 2020-10-23
GEMCH MATERIAL TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The alumina ceramics prepared by the above method have problems such as low density and low mechanical strength of the ceramics, which cannot meet the requirements of semiconductor equipment for alumina ceramics

Method used

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  • Aluminum oxide ceramic and preparation method thereof
  • Aluminum oxide ceramic and preparation method thereof
  • Aluminum oxide ceramic and preparation method thereof

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preparation example Construction

[0029] One embodiment of the present invention provides a method for preparing an alumina ceramic sintered body, such as figure 1 As shown, the following steps S10-S18 are included.

[0030] S10, making the alumina powder into slurry and drying to obtain alumina fine powder.

[0031] Specifically, alumina powder with an alumina content ≥ 99 wt % is made into a slurry to obtain an alumina slurry with a particle size D90 ≤ 0.8 μm, and then dried to obtain a fine alumina powder.

[0032] In some embodiments, the alumina content in the alumina powder is ≥99.99wt%, the D50 is 0.3μm-0.6μm, and the BET (specific surface area) is 10m 2 / g~20m 2 / g.

[0033] D90 means the particle size at which the particle cumulative distribution is 90%, that is, the volume content of particles smaller than this particle size accounts for 90% of all particles. D50 represents the particle size at which the particle cumulative distribution is 50%, also known as the median particle. A D50 of 0.3 μm ...

Embodiment 1

[0060] Raw materials: high-purity alumina powder: alumina purity over 99.99%, particle size D50: 0.4μm, BET: 13m 2 / g.

[0061] 1) Weigh 2000g of pure water from the grinding medium, weigh 20g of polyvinyl alcohol dispersant, add the dispersant to the pure water, stir and disperse evenly, and make a premix.

[0062] 2) Add 2000g of high-purity alumina powder to the premix, stir and disperse it into a slurry, and mill it for 5 hours in a high-speed sand mill to prepare an alumina slurry with a narrow particle size distribution and a small particle size. Its D90 is measured <0.8μm.

[0063] 3) The alumina slurry is dried in a spray dryer at an air inlet temperature of 280°C, an air outlet temperature of 120°C, and an atomization disc rotation speed of 10,000 rpm to prepare spherical alumina superfine powder .

[0064] 4) Weigh 250g of polyacrylic acid resin and melt it in an oil bath at 190°C. When the polyacrylic acid resin particles are completely melted into a liquid state...

Embodiment 2

[0069] Raw materials: high-purity alumina powder: alumina purity over 99.99%, particle size D50: 0.3μm, BET: 15m 2 / g.

[0070] 1) Weigh 2000g of pure water from the grinding medium, weigh 20g of polyvinyl alcohol dispersant, add the dispersant to the pure water, stir and disperse evenly, and make a premix.

[0071] 2) Add 2,000g of high-purity alumina powder to the premix, stir and disperse it into a slurry, and mill it with a high-speed sand mill for 4 hours to prepare an alumina slurry with a narrow particle size distribution and a small particle size, and its D90<0.8 μm.

[0072] 3) The alumina slurry is dried in a spray dryer at an air inlet temperature of 280°C, an air outlet temperature of 120°C, and an atomization disc rotation speed of 10,000 rpm to prepare spherical alumina superfine powder.

[0073] 4) Weigh 200g of polyacrylic acid resin and melt it in an oil bath at 190°C. When the polyacrylic acid resin particles are completely melted into a liquid state, the s...

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Abstract

The invention discloses aluminum oxide ceramic and a preparation method thereof. The method comprises the following steps that preparing aluminum oxide powder into a slurry to obtain an aluminum oxideslurry with the particle size D90 smaller than or equal to 0.8 micrometer; drying the aluminum oxide slurry to obtain aluminum oxide fine powder; wherein the content of aluminum oxide in the aluminumoxide powder is greater than or equal to 99wt%; heating and melting a photosensitive resin, a first dispersing agent and a lubricating agent, adding the aluminum oxide fine powder and an ultravioletlight absorber, uniformly mixing, and vacuumizing to obtain an aluminum oxide photocuring slurry; carrying out 3D printing molding on the aluminum oxide photocuring slurry to obtain an aluminum oxideceramic green body; degreasing and sintering the aluminum oxide ceramic green body under normal pressure to obtain aluminum oxide ceramic; wherein the normal-pressure degreasing and sintering conditions are as follows: the temperature is increased to 550-650 DEG C at the rate of (0.2-1) DEG C / min, the temperature is kept for 6-10 hours, then the temperature is increased to 1200-1400 DEG C at the rate of (1-5) DEG C / min, and the temperature is kept for 5-8 hours. The aluminum oxide ceramic prepared by the method has high density and good mechanical properties, and can meet the requirements of semiconductor equipment on ceramic materials.

Description

technical field [0001] The invention relates to the technical field of ceramics, in particular to an alumina ceramic and a preparation method thereof. Background technique [0002] The content of alumina in high-purity alumina powder is more than 99wt%, which has the characteristics of uniform particle size, easy dispersion and stable chemical properties. And mechanical properties, high-purity alumina ceramics have been widely used as plasma erosion-resistant materials in semiconductor and liquid crystal display etching manufacturing equipment. In semiconductor equipment, the value of precision ceramics accounts for about 20% of the equipment value, and the global market has an output value of about 6 billion US dollars. The production of semiconductor alumina precision ceramic components is in its infancy in China. The current accelerated development of the domestic semiconductor industry will inevitably lead to an increase in the demand for semiconductor alumina precision...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/111C04B35/622C04B35/626C04B35/638C04B35/64B33Y70/10B33Y10/00
CPCC04B35/111C04B35/622C04B35/6261C04B35/62625C04B35/62655C04B35/638C04B35/64B33Y70/10B33Y10/00C04B2235/5445C04B2235/5409C04B2235/6562C04B2235/6567C04B2235/77C04B2235/963C04B2235/96C04B2235/9607
Inventor 甘志俭程银兵杨斌庄志杰
Owner GEMCH MATERIAL TECH SUZHOU
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