Batch fabrication method and fabrication equipment for micropumps integrated with chips

A production method and batch technology, which can be applied to components of pumping devices for elastic fluids, mechanical equipment, pumps with flexible working elements, etc., and can solve problems such as difficult integration and complex processing.

Active Publication Date: 2020-10-23
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The main purpose of the present invention is to provide a batch production method and production equipment for micropumps integrated with chips, so as to get rid of the technical defects of the existing mechanical micropumps, such as complex processing process and difficult integration, and realize mass production. Make standardized micropump units, simplify the integration difficulty of micropumps on microfluidic chips, and meet the needs of high-throughput fluidic drives

Method used

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  • Batch fabrication method and fabrication equipment for micropumps integrated with chips
  • Batch fabrication method and fabrication equipment for micropumps integrated with chips
  • Batch fabrication method and fabrication equipment for micropumps integrated with chips

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Embodiment Construction

[0038] Embodiments of the present invention will be described in detail below. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0039] It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be used for fixation as well as for coupling or communication.

[0040] It is to be understood that the terms "length", "width", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in ...

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Abstract

The invention provides a batch fabrication method and fabrication equipment for micropumps integrated with chips. By means of the batch fabrication method and fabrication equipment for the micropumpsintegrated with the chips, integrated fabrication and mass machining of the chip-integrated micropumps are realized, a plurality of micropump units in array distribution are made at one time, each micropump unit comprises two one-way valves, a micropump cavity, a film structure and a micropump driving cavity, and one single cut micropump unit can be integrated into a flow channel in a relatively simple manner to be used for fluid driving; and integrated pouring of the micropumps with valves can be realized, high-volume and standardized machining of the micropumps is realized, the integration difficulty of the micropumps on micro-fluidic chips is simplified, and the high-throughput fluid driving requirements are met.

Description

technical field [0001] The invention relates to the field of microfluid drive, in particular to a batch production method and equipment for micropumps integrated with chips. Background technique [0002] Microfluidic chip technology is a technical science that drives and controls microfluidics at the micron scale. Because of its characteristics of high throughput, high integration, miniaturization, and low cost, it is widely used in the fields of biology, chemistry, and materials. Sample preparation, reaction, separation, detection, complex process simulation and analysis, etc. As the "heart" of microfluidic chip systems, micropumps have a strong demand for micropumps that are easy to control and easy to integrate for any chip that needs to be driven by microfluidics. [0003] Chip integrated micropumps are divided into mechanical micropumps and non-mechanical micropumps according to the presence or absence of moving parts. Among them, the non-mechanical micropump has weak...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/06F04B53/10F04B53/22
CPCF04B43/06F04B53/10F04B53/22
Inventor 弥胜利杜志昌
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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