Semiconductor silicon wafer cutting slurry on-line recovery device and recovery process of semiconductor silicon wafer cutting slurry

Abstract

The invention relates to a semiconductor silicon wafer cutting slurry on-line recovery device and a recovery process of the semiconductor silicon wafer cutting slurry. The device comprises a waste slurry blending module (1) used for leading in waste slurry and carries out density adjustment, a solid-liquid separation module (2) used for separating solid substances and liquid substances from the waste slurry in the waste slurry blending module (1), blending the solid substances and then inputting the blended solid substances into a finished product slurry storage tank (3), filtering and recycling liquid substances through a filtrate filtering module (6), and a recycled slurry transfer module (5) used for leading the new slurry in a new slurry storage tank (4) to the finished product slurrystorage tank (3), stirring and mixing uniformly and then pumped into the recycled slurry transfer module (5) to be guided out for use. The semiconductor silicon wafer cutting slurry on-line recovery device and the recovery process of the semiconductor silicon wafer cutting slurry can effectively improve the slurry recovery quality and release the labor force.

Description

technical field [0001] The invention relates to an on-line recycling device for slurry in a semiconductor silicon wafer cutting process and a recycling process thereof, belonging to the technical field of environmental protection separation. Background technique [0002] At present, in the production process of semiconductor silicon wafer cutting, the effect of wire cutting machine on silicon wafer cutting has an inseparable relationship with the performance of cutting slurry. Therefore, slurry is an important part of silicon wafer cutting process. Important consumables; in order to reduce production costs and protect the environment, silicon wafer manufacturing companies recycle the cutting slurry online during the silicon wafer cutting process; the conventional practice is to collect the waste slurry through the collection bucket, Unified outsourcing processing through qualified enterprises; but this is inefficient and increases the cost of the enterprise; for this reason,...

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Problems solved by technology

[0002] At present, in the production process of semiconductor silicon wafer cutting, the effect of wire cutting machine on silicon wafer cutting has an inseparable relationship with the performance of cutting slurry. Therefore, slurry is an important part of silicon wafer cutting process. Important consumables; in order to reduce production costs and protect the environment, silicon wafer manufacturing companies recycle the cutting slurry online during the silicon wafer cutting process; the conventional practice is to collect the waste slurry through the collection bucket, Unified outsourcing processing through qualified enterprises; but this is inefficient and increases the cost of the enterprise; for this reason, many enterprises have begun to study online recycling methods to improve recycling efficiency and reduce recycling costs; such as "Yingli Energy (China) Co., Ltd." applied for Chinese patent CN201420279128.1 "on-line mortar recovery system", which "is designed with a first mortar storage tank and a second mortar storage tank, wherein the first mortar storage tank is a large-capacity old mortar storage The second slurry storage tank is a recycled mortar storage tank, which is connected in series with the old mortar storage tank and the recycled mortar storage tank of the online mortar recycling equipment, so as to realize the storage of used mortar and recycled mortar supplied to the online mortar recycling equipment , with storage, automatic supply of old mortar, recycled mortar, filtering, stirring and other functions, thus playing a role in stabilizing workshop production

", which recycles the pulp in real time through online methods, but in actual use, it is found that the recycling effect of this method is relatively poor, and the quality of the recycled pulp is not satisfactory; therefore, there is an urgent need for a method that can effectively improve the recovery process. Slurry quality recovery device and its recovery process

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