Device and method for preparing micro-nano structure by running water-assisted ultrafast laser

Abstract

The invention discloses a device and method for preparing a micro-nano structure by running water-assisted ultrafast laser. The method comprises the steps that firstly, a workpiece is fixedly connected with a servo feeding device through a clamp; the workpiece is put into a working box through the servo feeding device, the suspension height, the incident angle and the flowing speed of running water of a nozzle are adjusted, the nozzle is opened, and a stable and uniform running water layer is formed on the surface of the workpiece within time T1; within the time T2, the workpiece is moved to alaser machining area through the servo feeding device, a laser device is started to emit laser, and the laser is accurately focused to the machining position of the upper surface of the workpiece below the running water layer through a reflecting mirror and a convex lens; within the time T3, the ultrafast laser and the upper surface of the workpiece form a layer of titanium alloy surface structure through photochemical action; and according to the preset machining depth of a metal microstructure of the workpiece, cyclic machining is conducted till the workpiece is machined. According to the device and method, a recast layer and chippings are effectively removed, the machining quality is improved, part clamping does not need to be changed in the machining process, and the machining efficiency is improved.

Description

technical field [0001] The invention belongs to special processing technology, and in particular relates to a device and method for preparing micro-nano structures assisted by flowing water with ultrafast laser. Background technique [0002] Due to the special titanium alloy surface structure, the surface of aircraft wings can achieve drag reduction and self-cleaning characteristics. The geometry of the surface structure of titanium alloy is complex, the processing is difficult, and the processing quality is high. Processing quality (recast layer, microcracks) directly determines the effects of drag reduction and self-cleaning, and determines the life and reliability of aircraft-related components. The research on the micromachining method of the surface structure of titanium alloy has become a research hotspot at home and abroad. [0003] C.A.A.Rashed uses water jet-assisted laser processing to etch metal materials, and reduces the recast layer and eliminates debris throu...

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Problems solved by technology

[0003] C.A.A.Rashed uses water jet-assisted laser processing to etch metal materials, and reduces the recast layer and eliminates debris through water jets. However, the long-pulse laser still removes materials through thermal effects, and there are problems such as recast layers and microcracks.

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