Graphene-based flow velocity sensor optical chip and application thereof

A technology of flow velocity sensor and optical chip, which is applied in the direction of fluid velocity measurement, instruments, chemical instruments and methods, etc., to achieve the effect of improving time and space resolution

Inactive Publication Date: 2020-11-17
SHANDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are electrical sensors based on the electrical properties of graphene, but they can only measure the flow rate of conductive liquids. In addition to excellent electrical properties, graphene also exhibits excellent optical properties, especially the interaction with light.

Method used

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  • Graphene-based flow velocity sensor optical chip and application thereof
  • Graphene-based flow velocity sensor optical chip and application thereof
  • Graphene-based flow velocity sensor optical chip and application thereof

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Experimental program
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Embodiment Construction

[0030] Embodiments of the present invention provides an apparatus for using a real-time monitoring absorption graphene polarization dependent effects of the fluid flow rate, the apparatus comprising:

[0031] figure 1 Is an optical path view of the device, wherein 1 is a laser, 2 is a attenuator, 3 is a polarizer, a quarter-wave plate 4, 5 is an optical chip, a Wollaston prism 6, a stop 7, 8 balanced detector.

[0032] DETAILED steps embodiment of the present device is as follows:

[0033] 1, to obtain graphene glass

[0034] First, a quartz glass with a high precision polishing polishing machine to obtain a clean and smooth optical surface. Then, the quartz glass is immersed in water, successively, a solution of isopropanol and subjected to ultrasonic washing in acetone for 15 minutes. Finally, the cleaned quartz glass N 2dry. The temperature of the tube furnace was set to 1050 deg.] C, 1mm thick on a clean quartz glass growing graphene by low pressure chemical vapor deposition ...

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Abstract

The invention discloses a flow velocity sensor optical chip based on graphene and application thereof. The optical chip is of a multi-layer film coupling structure with a quartz glass/graphene film/microfluid channel dielectric layer sequentially pasted on one side of the bottom edge of a rectangular prism, and a microfluid channel is formed in the side, tightly attached to the graphene film, of the microfluid channel dielectric layer. Real-time monitoring of the flow velocity of the fluid is achieved through the optical chip, due to the excellent optical characteristic of the graphene material and the dependent absorption characteristic of the graphene material on polarized light, the time resolution and the spatial resolution of the sensor are greatly improved, and the limitation that other flow velocity sensors can only monitor the flow velocity of conductive liquid is broken through; the flow velocity sensor optical chip can be used for monitoring the flow velocity of non-conductive liquid.

Description

Technical field [0001] The present invention relates to the field of liquid flow rate measured in real time, in particular, to a method and device based on polarization-dependent absorption graphene effect real-time monitoring of the flow rate. Background technique [0002] Integrated microfluidic sensor developed rapidly over the years, has a wide range of applications in physics, chemistry, biology and biomedical analysis. The vigorous development of microfluidic chip to measure the demand for microfluidic flow more urgent, especially in real-time and accurate detection of flow rate. Features microfluidic chip is small, a large working space. Add the flow measuring apparatus based on the ultrasonic Doppler effect by the tracer particles in a fluid test, before and after trapping reflector (acting on the tracer particles) generated in the ultrasonic frequency difference, then by the tracer particles in a fluid flow simulation of the flow rate of fluid to be measured. However, co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P5/26B32B17/10B32B27/28B32B33/00
CPCG01P5/26B32B27/283B32B33/00B32B2307/416
Inventor 邢飞吴田鸽李宗文韩雪田敬坤姬广民
Owner SHANDONG UNIV OF TECH
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