Wide-range linear pressure sensor based on Mach-Zehnder structure and detection method thereof

Abstract

The invention relates to a wide-range linear pressure sensor based on a Mach-Zehnder structure and a detection method thereof. The sensor comprises a Mach-Zehnder structure, the Mach-Zehnder structurecomprises an input beam splitter, two interference arms with different lengths and an output beam combiner. When the pressure acts on a pressure sensing area, the effective refractive index change amount of the pressure sensing area is solved through the change amount of the central wavelength of the output spectrum of a device, the magnitude of the pressure applied to the pressure sensing area is calculated through the photoelastic effect, and the central wavelength of the output spectrum is the wavelength corresponding to the maximum ratio of the output intensity to the input intensity. Thepressure sensor and the detection method thereof provided by the invention have an ultra-large measuring range, the device measuring range can reach 40 MPa, and when the external pressure changes between 0 MPa and 40 MPa, the device central wavelength linearly changes along with the pressure between 1525 nm and 1565 nm.

Description

technical field [0001] The invention relates to a large-range linear pressure sensor based on a Mach-Zehnder structure and a detection method thereof, belonging to the technical field of pressure measurement. Background technique [0002] High-precision pressure sensors are mainly used in the automotive industry, automatic control, aerospace and navigation, medical and health, and military, and have broad applications in future robots, robotic arm perception, automatic driving, and artificial intelligence control. In theory, optical measurement has higher precision than mechanical methods. At present, high-precision sensing mainly relies on optical methods. Optical chip sensors have the characteristics of sensor intrinsic insulation, anti-electromagnetic interference, high integration, high bandwidth, reusability, and biochemical compatibility. They are widely used in biomolecular detection, environmental pollution control, and chemical process control. At present, there ar...

AI Technical Summary

Problems solved by technology

The traditional Mach-Zehnder sensor is based on light intensity detection, and the relationship between the measurement and light intensity is a sine-cosine curve. In actual use, the method usually used is to use only a segment with better linearity; In the case of a large pressure measurement range, the change in light intensity caused by the pressure change is small, and there is a certain contradiction between its sensitivity and the measurement range

And because this measurement method itself is not linear, it brings great inconvenience to factory calibration and post-calibration

[0004] The pressure of the pressure sensor with the microring structure is linear to the central wavelength of the reflection spectrum, but the change of the central wavelength is too small. It can reach 1pm, so the resolution of the pressure sensor of the microring structure is too low is the main disadvantage

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