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Large vacuum glow power generation nano-film coating equipment and working mode thereof

A nano-film and vacuum coating technology, which is applied in the direction of vacuum evaporation plating, metal material coating process, coating, etc., to achieve the effects of increasing deposition speed, improving social and economic efficiency, and improving coating uniformity

Pending Publication Date: 2020-12-01
昆山立特纳米电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Purpose of the invention: The purpose of the present invention is to provide a large-scale vacuum glow power generation nano-film coating equipment and its working method, which solves the problems existing in the use of nano-film coating equipment

Method used

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  • Large vacuum glow power generation nano-film coating equipment and working mode thereof
  • Large vacuum glow power generation nano-film coating equipment and working mode thereof
  • Large vacuum glow power generation nano-film coating equipment and working mode thereof

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Embodiment 1

[0044] Such as figure 1 Shown is the front view of the present invention, including slide valve pump 1: a slide valve is housed in the pump body, and an eccentric wheel is housed in the slide valve, and the shaft leading to the outside of the pump cylinder drives the eccentric wheel to rotate, and the outer circle of the slide valve is at the center of the pump cylinder. The surface slides, and the upper part of the slide valve freely slides up and down and swings left and right in the semicircular slide valve guide rail; the upper part of the slide valve is hollow, and the gas passes through the hollow part of the slide valve, and the compressed gas pushes the exhaust valve out of the pump. , so the cycle works;

[0045] Pre-pumping valve 2: After the slide valve pump is started, the pre-pumping valve is mainly used for rough pumping, which is used for low vacuum and closed for high pumping;

[0046] Fore-stage valve 3: After the rough pumping is completed, the pre-pumping v...

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Abstract

The invention discloses large vacuum glow power generation nano-film coating equipment and a working method thereof. The equipment comprises a slide valve pump, a pre-pumping valve, a foreline valve,a diffusion valve, a high valve and a vacuum coating chamber; the vacuum coating chamber comprises a coating chamber main body, a rotary hanging frame structure and a coating chamber door structure; the rotary hanging frame structure is arranged in the middle of the coating chamber main body, and the coating chamber door structure is arranged on the side edge of the coating chamber main body; andthe coating chamber door structure is of a double-layer structure, and a pulse electromagnetic generator is arranged in an interlayer. The pulse electromagnetic generator is arranged on the interlayerof the coating chamber door structure of the double-layer structure, so that the plasma energy in the chamber is multiplied, the deposition speed of coating is greatly increased, and the uniformity of a coated workpiece in the vacuum coating chamber from top to bottom is improved.

Description

technical field [0001] The invention relates to the field of nano-coating, in particular to a large-scale vacuum glow power generation nano-film coating device and a working method thereof. Background technique [0002] In order to improve the surface properties of some mechanical parts, in order to reduce vibration, reduce noise, reduce friction, prolong life, etc., the surface of the parts is often treated with nano-film coating technology, and the components with a size of nanometers are embedded in The substrate forms a thin film material of wear-resistant and corrosion-resistant coating. [0003] Due to the complexity of the nano-film coating process, there are major deficiencies in the equipment currently used: 1) The existing equipment, due to the troublesome installation of its hanging structure, is currently on the market. The height of the equipment does not exceed 1500mm, which means The whole coating coating cavity is relatively small, the loading capacity of th...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/50C23C14/56B82Y30/00B82Y40/00
CPCB82Y30/00B82Y40/00C23C14/35C23C14/505C23C14/56
Inventor 周树法
Owner 昆山立特纳米电子科技有限公司
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