Ultra-narrow band infrared thermal radiation light source and compact infrared gas sensor

A technology of thermal radiation light source and gas sensor, which is applied to instruments, electric heating devices, scientific instruments, etc., can solve the problems of low cost, large volume, small volume, etc., and achieves low processing cost, narrow radiation spectral bandwidth, and improved detection sensitivity Effect

Active Publication Date: 2020-12-15
CHONGQING UNIV
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  • Abstract
  • Description
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Problems solved by technology

[0007] The present invention intends to provide an ultra-narrow-band infrared heat radiation light source and a compact infrared gas sensor, which can solve the problem...

Method used

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  • Ultra-narrow band infrared thermal radiation light source and compact infrared gas sensor
  • Ultra-narrow band infrared thermal radiation light source and compact infrared gas sensor
  • Ultra-narrow band infrared thermal radiation light source and compact infrared gas sensor

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Embodiment

[0039] Such as figure 1 and figure 2 As shown, this embodiment discloses an ultra-narrow-band infrared thermal radiation light source, which includes from bottom to top: a first substrate 1 , a support layer 2 , a heating plate 4 , a metamaterial absorber and a sealing layer 9 .

[0040] The first substrate 1 is a CMOS substrate, the supporting layer 2 is deposited on the first substrate 1, and forms a cavity structure, between the heating plate 4 and the supporting layer 2 and between the heating plate 4 and the metamaterial absorber Both are equipped with a first insulating layer 3, an insulating layer is deposited on the support layer 2, and an insulating layer is deposited on the heating plate 4. The setting of the first insulating layer 3 can avoid direct contact between various parts.

[0041] In this embodiment, the heating plate 4 is a MEMS heating plate 4, the metamaterial absorber includes a metal plate 6 and a microarray structure, the metal plate 6 is connected t...

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Abstract

The invention relates to the technical field of gas sensors, in particular to an ultra-narrow band infrared thermal radiation light source and a compact infrared gas sensor. The ultra-narrow band infrared thermal radiation light source comprises a first substrate, a supporting layer, a heating plate, a metamaterial absorber and a sealing layer, wherein the metamaterial absorber comprises a metal plate and a microarray structure; the microarray structure is arranged on the metal plate, and the microarray structure comprises a dielectric layer and a metal antenna; and first insulating layers arearranged on the two sides of the heating plate. The compact infrared gas sensor comprises a gas chamber, an infrared emitter and an infrared detector, wherein the infrared emitter uses the ultra-narrow band infrared thermal radiation light source, a reflecting layer is arranged on the inner wall of the gas chamber, and the infrared detector comprises a second substrate, a heat insulation micro-bridge, a heat sensitive layer and a metasurface. The low-radiation compact infrared gas sensor can solve the problems that a traditional infrared gas sensor is large in size, high in cost and the like,and has the advantages of being small in size, low in power consumption, low in cost, capable of detecting various gases at the same time and the like.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to an ultra-narrowband infrared thermal radiation light source and a compact infrared gas sensor. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal. [0003] The application of gas sensors in the civil field is mainly reflected in: in the kitchen, detecting the leakage of civil gas such as natural gas, liquefied petroleum gas and city gas, and automatically controlling the cooking of food in the microwave oven by detecting the gas generated when food is cooked in the microwave oven; houses, buildings, etc. , Conference rooms and public entertainment places use carbon dioxide sensors, smoke sensors, ozone sensors, etc. to control the automatic operation of air purifiers or electric fans; in some high-rise buildings, gas sensors can also be used to detect fire signs and alarm. [0004] In t...

Claims

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Application Information

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IPC IPC(8): G01N21/3504G01N21/31G01N21/01G01N21/25H05B3/00
CPCG01N21/01G01N21/255G01N21/31G01N21/3504G01N2021/0112G01N2021/3129H05B3/0019H05B3/0033
Inventor 牟笑静李东晓周鸿惠新丹
Owner CHONGQING UNIV
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