Source-through operation method and process equipment in diffusion process

Abstract

The embodiment of the invention provides a source-through operation method and process equipment in a diffusion process, wherein the method comprises the steps: obtaining the current liquid level of asource liquid in a source bottle when a source pressure compensation condition is met; based on the current liquid level of the source liquid and a preset corresponding relation, determining the source pressure required for executing the source communication operation this time, wherein the preset corresponding relation is the corresponding relation between the liquid level and the source pressure when the source communication amount carried by each source communication operation is the same under the fixed source communication associated parameters; and executing the source communication operation based on the source pressure required by the source communication operation and the fixed source communication associated parameters. According to the embodiment of the invention, the yield ofsheet resistance of semiconductor devices such as crystalline silicon solar cells can be improved, the production stability is greatly improved, the labor cost is reduced, and the production efficiency is improved.

Description

technical field [0001] The present application relates to the field of semiconductors, in particular to a source-through operation method and process equipment in a diffusion process. Background technique [0002] The conventional process flow of crystalline silicon solar cell manufacturing mainly includes slicing, texturing, diffusion, etching, coating, silk screen printing, sintering, testing and sorting and other processes. In the production process of crystalline silicon solar cells, the diffusion process is the core process, and controlling the quality of the diffusion process is the key to improving the quality and efficiency of cells. [0003] The important indicators to measure the quality of the diffusion process are square resistance and uniformity. Different square resistances represent different diffusion degrees, which are closely related to doping time, doping temperature, and source flux. How to automatically adjust the square resistance and maintain the con...

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Problems solved by technology

[0006] In the case of certain process parameters such as the flow rate of the small nitrogen gas and the temperature in the source bottle, the change of the liquid level of the source liquid will cause the change of the stroke of the small nitrogen gas in the source liquid, which will affect the flow rate of the source liquid carried by the small nitrogen. The amount of source, which directly affects the outcome of the diffusion process

Finally, the square resistance of different batches of crystalline silicon solar cells fluctuates, that is, the square resistance of each batch of crystalline silicon solar cells in at least some batches is inconsistent with that of other batches of crystalline silicon solar cells. The qualification rate of the square resistance of the battery has been greatly reduced

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