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A kind of high thermal conductivity silicon nitride ceramic material and preparation method thereof

A technology of silicon nitride ceramics and raw materials, which is applied in the field of high thermal conductivity silicon nitride ceramic materials and its preparation, can solve the problems of high single substance cost of rare earth metals, high activity of rare earth metals, complex preparation process, etc., and reduce phonon scattering , The effect of reducing the content of intergranular phase and reducing the content of lattice oxygen

Active Publication Date: 2021-10-01
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cost of using rare earth metals is high, and it is not easy to obtain; and the rare earth metals have high activity, the mixing process needs to be carried out under the protection of an inert atmosphere, and the preparation process is complicated.

Method used

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  • A kind of high thermal conductivity silicon nitride ceramic material and preparation method thereof
  • A kind of high thermal conductivity silicon nitride ceramic material and preparation method thereof
  • A kind of high thermal conductivity silicon nitride ceramic material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] With 1mol% Y 2 o 3 and 19mol% Mg as a sintering aid, and 80mol% α-Si 3 N 4 The powder is mixed by ball milling, dried and sieved to obtain a uniformly mixed powder; then dry-pressed under a pressure of 20MPa, and then subjected to cold isostatic pressing under a pressure of 300MPa; the green body obtained is put into a BN crucible , at N 2 At 600°C for 4 hours for magnesia thermal reduction pre-sintering treatment; the obtained green body was sintered at 1800°C under pressure, and the heating rate was 5°C / min, N 2 The pressure is 2MPa, and the holding time is 4h; after sintering, cool to 1200°C at a cooling rate of 10°C / min, and then cool to room temperature with the furnace.

[0051] The thermal conductivity of the silicon nitride ceramic material prepared in Example 1 is 77.56W·m -1 ·K -1 , The three-point bending strength is 1024±42MPa.

Embodiment 2

[0053] With 5mol% Y 2 o 3 and 10mol% Mg as a sintering aid, and 85mol% α-Si 3 N 4 The powder is mixed by ball milling, dried and sieved to obtain a uniformly mixed powder; then it is dry-pressed under a pressure of 20MPa, and then subjected to cold isostatic pressing under a pressure of 250MPa; the green body obtained is put into a BN crucible , held at 800°C for 6h under Ar for magnesia thermal reduction pre-sintering treatment; the obtained green body was sintered at 1850°C under pressure, and the heating rate was 10°C / min, N 2 The pressure is 3MPa, and the holding time is 6h; after sintering, cool to 1000°C at a cooling rate of 10°C / min, and then cool to room temperature with the furnace.

[0054] The thermal conductivity of the silicon nitride ceramic material prepared in Example 2 is 95.25W·m -1 ·K -1 , The three-point bending strength is 906±18MPa. The micro-morphology of the polished surface of the silicon nitride ceramics prepared in this embodiment is as follows...

Embodiment 3

[0056] With 2mol% Y 2 o 3 and 8mol% Mg as a sintering aid, and 90mol% α-Si 3 N 4 The powder is mixed by ball milling, dried and sieved to obtain a uniformly mixed powder; then it is dry-pressed under a pressure of 30MPa, and then subjected to cold isostatic pressing under a pressure of 300MPa; the green body obtained is put into a BN crucible , held at 750°C for 2h under Ar for pre-sintering treatment; the obtained green body was sintered at 1900°C under pressure, and the heating rate was 5°C / min, N 2 The pressure is 3MPa, and the holding time is 12h; after sintering, cool to 1200°C at a cooling rate of 10°C / min, and then cool to room temperature with the furnace.

[0057] The thermal conductivity of the silicon nitride ceramic material prepared in Example 3 is 123.08W·m -1 ·K -1 , The three-point bending strength is 747±21MPa.

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Abstract

The invention relates to a high thermal conductivity silicon nitride ceramic material and a preparation method thereof, wherein the raw material composition of the silicon nitride ceramic material includes α-Si 3 N 4 and sintering aids; the sintering aids are rare earth metal oxides and metal magnesium; the rare earth metal oxides are Y 2 o 3 , Yb 2 o 3 、Gd 2 o 3 、Ce 2 o 3 、Sm 2 o 3 , La 2 o 3 、Tm 2 o 3 、Lu 2 o 3 、Nd 2 o 3 、Er 2 o 3 and Sc 2 o 3 At least one of the metal magnesium is elemental Mg.

Description

technical field [0001] The invention relates to a silicon nitride ceramic material with high thermal conductivity (that is, high thermal conductivity) and a preparation method thereof, in particular to a silicon nitride ceramic material with high thermal conductivity that uses rare earth metal oxides and metal magnesium powder as sintering aids and is sintered by pressure to prepare silicon nitride with high thermal conductivity. 3 N 4 The method for ceramic materials belongs to the field of inorganic non-metallic materials. Background technique [0002] High-power semiconductor devices are more and more widely used in wind power generation, photovoltaic power generation, electric vehicles, high-speed railways, aerospace and other fields. The ceramic substrate in semiconductor devices mainly plays the role of support and heat dissipation, which requires the substrate material to have excellent mechanical properties and high thermal conductivity. The currently used ceramic s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/593C04B35/622
CPCC04B35/5935C04B35/622C04B2235/3225C04B2235/401C04B2235/602C04B2235/656C04B2235/6562C04B2235/6565C04B2235/6567C04B2235/658C04B2235/96C04B2235/9607
Inventor 曾宇平王为得左开慧夏咏锋姚冬旭尹金伟梁汉琴
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI