An integrated combination method for high-pressure experimental sample preparation and characterization

A combination method and high-pressure experiment technology, which is applied in the preparation of test samples, the use of stable tension/pressure to test the strength of materials, instruments, etc., can solve the problems of inaccurate control, poor experimental repeatability, and low experimental success rate. Achieve the effect of smooth electrical path, precise and controllable arrangement, and simple operation process

Active Publication Date: 2022-04-08
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0011] In view of the above analysis, the present invention aims to provide an integrated combination method for high-pressure experiment sample preparation and characterization, in order to solve one of the following technical problems: (1) it is difficult to operate the sample preparation process in the existing high-pressure experiment process; The size, shape, and position of the sample cannot be accurately controlled, resulting in poor repeatability of the experiment; (3) The contact between the sample and the electrode is poor when the sample is tested for electrical properties; (4) The electrode is prone to short circuit, resulting in a low success rate of the experiment

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  • An integrated combination method for high-pressure experimental sample preparation and characterization

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Embodiment 1

[0125] This embodiment provides a high-pressure experimental sample preparation method. Using the above-mentioned high-pressure experimental sample preparation method, the prepared sample is a SiC film; wherein, the RF magnetron sputtering power is 100W, the argon gas flow rate is 3.2mL / min, and the coating time is 10min.

[0126] In this embodiment, 4 parallel samples were produced with the same process parameters, respectively marked as 1#, 2#, 3#, 4#; the thickness of the 4 parallel samples was tested, and the test results were as follows: Figure 4 As shown, (a), (b), (c), and (d) are schematic diagrams of the results of 1-4# respectively, which are 45.3nm, 46.26nm, 47.2nm, and 46.09nm respectively; it can be seen that the results obtained after different times of coating The thickness is slightly deviated, the average thickness is 46.21nm, the standard deviation is: 1.3nm, and the error percentage is 2.8%. According to the requirements, generally an error of less than 5% ...

Embodiment 2

[0128] This embodiment provides an integrated combination method for high-voltage experimental sample preparation and characterization. Using the above-mentioned integrated combination method for high-voltage experimental sample preparation and characterization, the plated sample is La, and the electrode material is Pt; wherein, the radio frequency magnetron sputtering power is 110W, The flow rate of argon gas is 2mL / min, and the coating time is 5min.

[0129] In this example, 2 parallel samples were produced using the same process parameters, and the 2 parallel samples were electrically tested, and the resistance deviation at a temperature of 280K was taken. The test results are as follows Figure 5 It can be seen that the error of the resistance data of the two parallel samples of the present invention is less than 3%. It can be seen that the high-voltage experimental sample preparation and characterization integrated combination method of the present invention has good repea...

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Abstract

The invention discloses an integrated combination method for high-pressure experiment sample preparation and characterization, which belongs to the technical field of high-pressure experiment research, and solves the difficulties in sample preparation in the high-pressure experiment process in the prior art, and the inability to accurately control the size, shape, and position of the sample leads to experimental failures. The repeatability is very poor, and the problem of poor contact between the sample and the electrode when the sample is tested for electrical properties. In an integrated combination method, samples and internal electrodes are prepared by magnetron sputtering coating. Including: pre-pressing a dent on the metal gasket; punching the first small hole in the center of the dent, and then filling the first small hole and its surroundings with insulating material to form a thin layer covering the entire indentation; A second small hole is drilled in the middle of the thin layer as a high-pressure chamber for placing samples; after filling the high-pressure chamber with pressure-transmitting medium, remove part of the pressure-transmitting medium at the center to leave a good space for the sample; use magnetron sputtering coating on the The internal electrode and sample are prepared on the anvil surface of the anvil. The method of the invention has good repeatability.

Description

technical field [0001] The invention belongs to the technical field of high-pressure experiment research, and in particular relates to an integrated combination method for high-pressure experiment sample preparation and characterization. Background technique [0002] The diamond anvil is one of the most important and commonly used techniques in high-pressure experimental research on materials. Diamond is the hardest substance among known common materials. Using it as an anvil can form a superhigh pressure and high pressure cavity at the tip, and can study the changes of samples under the pressure in the high pressure cavity, so as to obtain new substances or reveal new materials. physical phenomena and laws. [0003] In order to detect the change process of the state of the sample in the high-pressure chamber with the pressure, the properties of the internal sample can be tested in real time by electrical means. Since the diameter of the anvil surface of the diamond anvil ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/28G01N27/04G01N27/72G01N19/00G01N3/08
CPCG01N1/28G01N27/041G01N27/72G01N3/08G01N19/00
Inventor 靳常青何鑫冯少敏
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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