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Composite nano material and corresponding novel nano coating

A composite nanomaterial and nanotechnology, applied in metal material coating process, coating, mixer and other directions, can solve the problems of limited thickness of itself, limited coating thickness, equipment chamber pollution, etc., to achieve plasma resistance. The effect of etching and coating densification

Pending Publication Date: 2021-03-16
苏州艾美科新材料技术有限公司
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The protective coating prepared by traditional plasma powder spraying is limited by the porosity of the coating. The service life of the coating is limited. With the continuous improvement of semiconductor processing technology, it is difficult for traditional powder spraying to meet the requirements of high-order semiconductor process preparation. At present, Conventional materials resistant to plasma bombardment include titanium oxide, aluminum oxide, yttrium oxide, etc. Among them, yttrium oxide material is the current mainstream equipment protection material. The conventional preparation process is to feed the micron powder of yttrium oxide into the The plasma gun is heated in the body and finally sprayed onto the surface of the workpiece. Since the coating is made of micron powder, the porosity of the coating is very high. The etching gas in the equipment will accelerate the erosion of the protective coating through these gaps, so that The results are: 1. Due to the etching reaction may peel off the coating, the originally clean equipment chamber will be polluted, and the product will be polluted, and the product can no longer be used after being polluted
2. Even if the particles peeled off by the equipment itself are removed by the self-cleaning system of the equipment itself, the service life of the equipment components is shortened because of the pores of the coating itself, and the PVD coating process can greatly increase the porosity of the coating However, because the preparation price is very expensive, and the thickness of the prepared coating is very limited, although it can protect the equipment substrate well in a short period of time, due to its limited thickness, it needs to be replaced within a short period of use. Therefore, we propose a composite nanomaterial and a corresponding new nanocoating to solve the above problems

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  • Composite nano material and corresponding novel nano coating
  • Composite nano material and corresponding novel nano coating
  • Composite nano material and corresponding novel nano coating

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Experimental program
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Effect test

preparation example Construction

[0025] See Figure 1-3 The present invention provides a technical solution: a composite nanomaterial, the preparation method is as follows:

[0026] Preparation of S11, ruthenium halogen compound

[0027] Put the high-purity yttrium halogen compound feedstock into the nano-horizontal sand mill, carry out two stages of grinding and polishing, and ground gravel particles of 3000 microns in the grinding gravel for 240 minutes, remove the slurry and pour it. Enter another, grinding 120 minutes in zirconia particles having a particle diameter of the grinding gravel particles, and the particle was dispersed during the addition ratio of 1: 150, and the ratio of the slurry injection after the two grinding was The bonding reagent of 1: 250 is placed in a low temperature stirred tub, at which time the diameter of the solid particulate matter is in the range of 150 nanometers to 400 nanometers, the stirring temperature is 5 ° C and 8 ° C, and the slurry injection height is 3.5 through the per...

Embodiment example

[0032]Preferred cases, high-purity yttrium halogen compound feedstock, yttrium oxide raw materials, and aluminum oxide feedstocks are directly purchased from 99.995% refining raw materials, high-purity yttria-containing halogen compound feedstock particles 1 micron -5 microns, the particles of the yttrium oxide raw materials are 1 micron-5 microns, and the aluminum oxide feedstock is a compound containing 65% of aluminum and a compound containing 35% rare earth elements. The particle size is 1 micron-3 microns.

[0033] A new nano-coating of a composite nanomaterial, the preparation method is as follows:

[0034] S21, injecting the material into the conveying device, entering the plasma cavity by transporting a mixed-free transport composite nanomaterial liquid in a conveying device;

[0035] S22, the nanomaterial suspension liquid is heated by the atomized infusion apparatus into the plasma flame flow of the plasma apparatus, and finally forms a coating.

[0036] Preferred cases,...

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Abstract

The invention discloses a composite nano material and a corresponding novel nano coating. A preparation method comprises the following steps: an yttrium-containing halogen compound is prepared, an yttrium oxide raw material and an aluminum-containing oxide raw material are prepared, and the compound of the aluminum-containing oxide raw material and the aluminum-containing oxide raw material is mixed with the yttrium-containing halogen compound to prepare composite nano material mixture slurry, a composite nanometer material liquid material is stably conveyed into a plasma cavity through conveying equipment, a nanometer material suspension liquid material enters plasma flame flow of plasma equipment through an atomization liquid conveying equipment and then is heated, and finally the coating is formed. Compared with an original single material, the composite material is more resistant to plasma etching, and under the same equipment power, the service life of a novel composite material is prolonged by 45% compared with the service life of the original single material, a meltallizing coating prepared from the composite material through a specific process is more compact, and the service life of the meltallizing coating is prolonged by 45% compared with a coating prepared from the original single material.

Description

Technical field [0001] The present invention relates to the technical field of new materials, in particular a composite nanomaterial and a corresponding new nano-coating. Background technique [0002] The protective coating prepared by conventional plasma powder spraying is limited to the coating porosity of the coating life. As the semiconductor processing technology is constantly increasing, the conventional powder spraying is difficult to meet the requirements of the high-order semiconductor process, currently Conventional lyzed plasma bombardment materials include titanium oxide, alumina, cerium oxide, etc., wherein the yttrium oxide material is the current mainstream equipment protection material, and the conventional preparation process is to feed the cerium oxide micron powder through the conventional powder powder. The plasma gun body is heated, and finally sprayed into the surface of the workpiece, since the coating is a micron powder, the porosity of the coating is very...

Claims

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Application Information

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IPC IPC(8): C23C4/134C23C4/04B01F13/10
CPCC23C4/134C23C4/04B01F33/831
Inventor 陈长王成杰
Owner 苏州艾美科新材料技术有限公司
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