1395 results about "Yttrium(III) oxide" patented technology

The invention relates to the technical field of aluminum alloys, in particular to a high-fluidity corrosion-resistant aluminum alloy material for laser cladding as well as preparation and application of the high-fluidity corrosion-resistant aluminum alloy material. The material comprises the following components in percentage by mass: 3.12%-5.34% of nickel, 4.24%-6.76% of molybdenum, 6.54%-8.12% of cobalt, 10.45%-14.49% of silicon, 5.65%-8.45% of a functional additive, 1.25%-2.45% of cerium oxide, 3.46%-7.42% of yttrium oxide, 3.45%-7.58% of lanthanum oxide and the balance of aluminum, the functional additive is titanium carbide doped with Ti < 3 + >. The aluminum alloy material has high flowability during laser cladding and is well combined with a matrix, and related properties such as wear resistance, high temperature resistance, corrosion resistance and oxidation resistance of a coating formed by the aluminum alloy material are sufficiently uniform due to the high flowability of the aluminum alloy material.

The invention relates to the technical field of material science, in particular to a high-strength hard alloy and a preparation method and application thereof.The preparation method comprises the following steps that S1, raw materials of tungsten carbide, cobalt, tantalum carbide, niobium carbide, titanium carbide, yttrium oxide, nickel and trace strengthening elements are weighed according to the preset weight, and a mixture A is formed; s2, placing the mixture A in wet ball-milling equipment for ball-milling treatment; s3, the slurry obtained after ball milling is subjected to drying treatment; s4, carrying out plasma activation treatment on the dried powder; s5, pressing the activated powder to form a compact green body; s6, the green body is subjected to second-stage sintering treatment in a vacuum sintering furnace; s7, after sintering is completed, cooling treatment is conducted; by optimizing the alloy formula and innovating the preparation process, the hardness, toughness and high-temperature resistance of the high-strength hard alloy are improved, meanwhile, the production process is simplified, and the overall performance and application universality of the material are improved.

The invention relates to the technical field of ceramic substrates, and provides an aluminum oxide high-temperature co-fired multilayer ceramic substrate and a preparation method thereof. The aluminum oxide high-temperature co-fired multilayer ceramic substrate comprises the following raw materials in parts by weight: 80-90 parts of aluminum oxide, 3-6 parts of a reinforcing agent, 2-5 parts of a sintering aid, 85-95 parts of a solvent, 6-12 parts of a binder and 0.5-1.5 parts of a dispersing agent, the reinforcing agent comprises yttrium oxide coated silicon carbide and copper oxide. According to the technical scheme, the problem that the strength of the aluminum oxide high-temperature co-fired multilayer ceramic substrate is insufficient due to long-time high-temperature sintering of a low-viscosity liquid phase in related technologies is solved.

The invention relates to an ionically conductive membrane (10) for an electrochemical device, the membrane comprising a layer of a material comprising a polymer binder and a powdered ceramic, characterized in that the ceramic is doped with Yttrium oxide. Figure 1.

The invention discloses a preparation method and application of a plasma etching resistant coating, and relates to the technical field of coatings. Comprising the steps that a yttrium oxide layer is prepared through a low-pressure plasma spraying method, the yttrium oxide layer comprises a relative porous layer (the porosity is 1%-3%) and a compact layer (the porosity is smaller than 1%) which are sequentially stacked, and the relative porous layer is used for making contact with a base body. By adopting low-pressure plasma spraying, the yttrium oxide layer with controllable coating morphology and thickness can be obtained, and the thermal expansion coefficient mismatch between the substrate and the compact layer can be effectively relieved through the relative porous layer close to the substrate; the compact layer on the surface is uniform in structure, low in porosity, excellent in cohesion strength and excellent in plasma etching resistance, plasma and a matrix can be isolated, and generation of particles in the etching process is avoided. The compact layer and the relatively porous coating are both prepared on the basis of the same powder material and by adopting the same coating deposition equipment, so that the production efficiency can be improved, and the production cost and the pollution risk caused by transfer between production steps can be reduced.

The invention discloses a vacuum high-wear-resistance zirconia-based composite ceramic material as well as a preparation method and application thereof, and belongs to the technical field of ceramic material preparation. The preparation method comprises the following steps: 1) sufficiently and uniformly mixing zirconium oxide powder, a stabilizer and absolute ethyl alcohol to prepare mixed slurry; 2) adding whiskers into the mixed slurry, fully and uniformly stirring, and then drying and sieving to obtain mixed powder; 3) carrying out static pressure molding on the mixed powder to prepare a composite ceramic biscuit, and then carrying out vacuum sintering and annealing treatment to prepare composite ceramic; and 4) performing high-temperature carburizing treatment on the composite ceramic to obtain carburized composite ceramic, and performing surface treatment to obtain the vacuum high-wear-resistance zirconia-based composite ceramic material. The vacuum wear rate of the zirconia-based composite ceramic material provided by the invention is reduced by 1-2 orders of magnitude compared with that of a traditional yttria-stabilized zirconia material, and a novel high-wear-resistance ceramic material is provided for precise friction driving parts in the field of aerospace.

The invention relates to an integrated carbon / carbon composite material crucible containing an yttrium oxide coating, and belongs to the technical field of thermal field parts for monocrystalline silicon. The crucible comprises a carbon / carbon composite material crucible body, a glassy carbon coating and an yttrium oxide coating, the glassy carbon coating can effectively relieve thermal mismatch between the yttrium oxide coating and the carbon / carbon composite material crucible body, and carbon in the carbon / carbon composite material crucible body can be effectively prevented from escaping; impurities are not introduced into the yttrium oxide coating in the silicon melting process, so that the purity of a silicon material can be effectively ensured, and the yttrium oxide coating has excellent silicon erosion resistance and high-temperature stability; the carbon / carbon composite material crucible body is formed by densifying a carbon fiber prefabricated body which is formed by needling and laying a pure net tire for spraying resin, and the inner surface of the carbon / carbon composite material crucible body is a net tire which is wholly approximately isotropic, so that the overall mechanical strength of the crucible can be ensured, and a good combination effect with a subsequent functional coating can be ensured; and the service life of the crucible can be prolonged.

The invention belongs to the technical field of bonding chopper and preparation thereof, and particularly relates to a ceramic chopper, a preparation method thereof and application of the ceramic chopper in thermal ultrasonic bonding packaging of a semiconductor integrated circuit. The ceramic chopper provided by the invention is prepared by taking aluminum oxide as a matrix and matching silicon carbide nanofiber, magnesium oxide and yttrium oxide in a certain proportion through ball milling, granulation, molding and high-temperature sintering processes, has the broadband ultrasonic transmission capability of 20-135kHz, and has the maximum amplitude of 3.8 mu m. Experiments show that the chopper can shorten the bonding time by 25%, increase the qualified rate to 99%, increase the shear strength by 20%, and significantly improve the bonding efficiency and reliability. The ceramic chopper disclosed by the invention can well meet the requirements of thermal ultrasonic bonding packaging of a semiconductor integrated circuit on high energy efficiency and high precision bonding, and has a wide industrial application prospect.

The invention relates to the technical field of titanium alloy metallurgical powder, in particular to a preparation method of titanium alloy metallurgical powder. Comprising the following steps that firstly, titanium alloy raw materials are smelted into melt, and the melt is guided into an electromagnetic centrifugal device under the protection of inert gas; 2, primary crushing is conducted on the melt through an electromagnetic centrifugal device, the rotating speed is larger than or equal to 25000rpm, and pre-crushed particles with the particle size being 100-200 microns are obtained; 3, the pre-crushed particles are conveyed to an ultrasonic-assisted gas atomization chamber, argon and helium mixed gas is introduced, 20-40 kHz high-frequency ultrasonic waves are applied, and atomization refining is carried out; 4, the atomized particles are cooled to form titanium alloy metallurgical powder; according to the method, 1 vol% of modified yttrium oxide particles are introduced into atomized gas of the ultrasonic-assisted gas atomization chamber, the oxygen content of the titanium alloy powder can be reduced to 600-800 ppm from conventional 1200-1500 ppm, the reduction amplitude is about 40-50%, oxygen embrittlement can be effectively avoided, and the ductility and high-temperature strength of the alloy are improved.

The invention relates to the technical field of surface engineering, discloses a method and a system for preparing a yttrium fluoride composite ceramic coating through atmospheric plasma spraying, and aims to solve the problems that the yttrium fluoride coating generates a brittle aluminum fluoride layer on the surface of an aluminum substrate due to fluorine ion diffusion, so that the bonding strength is low, and the yttrium fluoride coating is easy to peel off and lose efficacy. The method comprises the following steps: sequentially carrying out mechanical polishing, ultrasonic cleaning and sand blasting roughening on an aluminum base material; preparing composite powder formed by mixing yttrium fluoride, yttrium oxide and nanometer aluminum oxide according to the mass ratio of 75: 20: 5; sequentially depositing a yttrium oxide transition layer, a composite barrier layer and a yttrium fluoride functional layer by adopting atmospheric plasma spraying; and finally carrying out vacuum post-heat treatment. According to the system, through the synergistic effect of the three layers of gradient structures, the transition layer forms an yttrium aluminate metallurgical bonding interface, the barrier layer inhibits fluorine ion diffusion through the dual mechanisms of nanometer aluminum oxide physical barrier and yttrium oxide chemical adsorption, and the functional layer guarantees the plasma erosion resistance. According to the method, the bonding strength of the coating is remarkably improved to 50 MPa or above, the porosity is lower than 3%, stripping is avoided under 500-hour high-energy plasma bombardment, the process cost is reduced by 40%, and the method is suitable for cavity protection of semiconductor etching equipment.

The invention discloses a preparation method of a toughening environmental barrier coating, and relates to a preparation method of a coating. The invention aims to solve the problem of poor fracture toughness of the existing environmental barrier coating. The method comprises the following steps: 1, pretreating a base material; 2, preparing a bonding layer; and 3, preparing the environmental barrier layer. The high-melting-point metal silicide prepared on the surface of the base material or the bonding layer compounded by the high-melting-point metal silicide and the rare earth silicate has excellent temperature resistance and good interface bonding strength, and due to the addition of the rare earth silicate, the expansion coefficient of the bonding layer is highly matched with that of the base material; according to the prepared yttrium oxide stabilized zirconia fiber, mullite fiber or silicon carbide fiber reinforced rare earth silicate environmental barrier layer, the fracture toughness of pure Yb2SiO5 is improved to 6.5 MPa.m < 1 / 2 >-8.0 MPa.m < 1 / 2 > from about 1.85 MPa.m < 1 / 2 >. The strengthening and toughening environmental barrier coating prepared by the invention has very important significance on development of thermal protection coatings of hot end parts of aircrafts with high thrust-weight ratios in China.

The invention discloses a silicon nitride ceramic-based composite material and a preparation method thereof, and relates to the technical field of silicon nitride ceramics. The silicon nitride ceramic-based composite material is prepared from silicon dioxide coated modified boron nitride and resin composite phase change microcapsules, Si3N4-C coated Al2O3 core-shell fiber aerogel, nano yttrium oxide and polyvinyl butyral, the silicon dioxide coated modified boron nitride and resin composite phase change microcapsules are stably attached to the surface of the Si3N4-C coated Al2O3 core-shell fiber aerogel in a chemical bonding and mechanical interlocking mode, the interface bonding strength is enhanced, the risk of phase separation is reduced, the combination effect of the silicon dioxide coated modified boron nitride and resin composite phase change microcapsules and the Si3N4-C coated Al2O3 core-shell fiber aerogel is better exerted, and the composite phase change effect of the silicon dioxide coated modified boron nitride and resin composite phase change microcapsules is improved. According to the present invention, the fracture toughness can be improved through fiber toughening, aerogel pore and microcapsule stress dispersion, the high temperature resistance can be improved through the low thermal conductivity of the aerogel and the heat absorption effect of the microcapsule, the mechanical property of the silicon nitride can be significantly improved through multiple ways and multiple modes, and the high temperature resistance can be effectively enhanced.

The invention relates to the technical field of coating preparation, in particular to a spraying process of a compact yttrium oxide coating, which comprises the steps of pretreatment, powder activation, matrix surface modification, meltallizing spraying, cooling curing, de-shielding treatment and post-cleaning. Yttrium oxide powder is activated through low-temperature plasma, sand blasting parameters and a high velocity oxy-fuel spraying process are optimized, the porosity of the coating is remarkably reduced to 1.5% or below, and the hardness is improved to 500 HV0.3. Internal stress is reduced in a sectional cooling mode, and balance of coating performance and economical efficiency is achieved in combination with a parameter optimization algorithm based on particle deposition dynamics. The preparation method can meet the requirement of the high-end semiconductor manufacturing field on a high-performance protective coating, and solves the problem of high porosity of a traditional process.

The invention provides a boron nitride-containing resin composition and application thereof. The boron nitride-containing resin composition comprises a combination of a resin material and modified boron nitride, the modified boron nitride is prepared by the following method which comprises the following steps: mixing boron nitride and a sintering aid, sintering and crushing to obtain the modified boron nitride, the sintering aid comprises any one or a combination of at least two of calcium oxide, magnesium oxide, silicon oxide, yttrium oxide, niobium oxide and potassium feldspar. Through the design of a modification method, the modified boron nitride has a high filling rate in a resin material, and the boron nitride-containing resin composition containing the modified boron nitride not only has high thermal conductivity, but also has high peel strength and excellent adhesive property, so that the metal foil-clad laminated board has excellent comprehensive effects in the aspects of high thermal conductivity and high reliability.

The invention relates to the field of investment casting of nickel-based single-crystal high-temperature alloy blades, in particular to a method for preparing an yttrium oxide coating through ultrasonic impregnation of a modified ceramic core. And the silane coupling agent is utilized to modify the surface of the silicon-based ceramic core, so that the adhesive force of the coating is improved, and the risk of coating stripping is reduced. In the preparation process of the coating, the permeability of the liquid coating can be improved by utilizing ultrasonic impregnation, a coating solution is promoted to permeate into tiny pores of the silicon-based ceramic core, and the adhesive force of the coating is further enhanced, so that a uniform and firm protective coating is formed on the surface of the silicon-based ceramic core. The scheme is green and environment-friendly, is simple and easy to operate, is suitable for various different types of coatings including materials such as metals, oxides and polymers, and has wide applicability.

The invention relates to a preparation method of an etching-resistant and wear-resistant Y2O3-AlxOy composite coating. The preparation method comprises the following steps: carrying out ultrasonic cleaning on a corrosion-resistant matrix; performing plasma bombardment cleaning activation on the surface of the corrosion-resistant matrix; a Y2O3 coating and an AlxOy coating are alternately deposited on a corrosion-resistant base body in a double-target magnetron sputtering mode to form the Y2O3-AlxOy composite coating, the sputtering power of a Y target is larger than that of an Al target, and the ratio of x to y in the AlxOy coating is larger than 1. According to the method, the amorphous AlxOy coating dominated by the metal state is introduced into the Y2O3 coating, growth of Y2O3 columnar crystals is continuously broken, crystal grains are refined, formation of intergranular easy-to-etch point locations is inhibited, and an yttrium aluminum oxide composite strengthening phase is formed at an interface, so that plasma etching resistance is improved; the thickness of a single-layer coating in the composite coating is very thin; under the action of growth stress, the structure of the coating presents a wave-shaped microstructure and a soft and hard alternate mechanical structure, and the soft and hard alternate mechanical structure is beneficial to inhibiting generation of transverse cracks, guiding friction crack level expansion, prolonging the friction life of the coating and reducing the wear rate.

The invention belongs to the technical field of rare earth thermal spraying, and particularly relates to spherical yttrium oxide powder for thermal spraying and a preparation method of the spherical yttrium oxide powder. The preparation method comprises the following steps: dissolving a yttrium oxide raw material with nitric acid to obtain a yttrium nitrate solution; sequentially carrying out parallel flow reaction, aging, washing and filtering on part of the yttrium nitrate solution and ammonia water to obtain yttrium hydroxide; sequentially carrying out parallel flow reaction, aging, washing and filtering on the residual yttrium nitrate solution and the mixed precipitant to obtain alkaline mixed yttrium; the preparation method comprises the following steps: mixing yttrium hydroxide and alkaline mixed yttrium with water, then adding a dispersing agent and an adhesive step by step, stirring, and carrying out spray granulation to obtain granulated powder; roasting the granulated powder, adding water, carrying out ball milling, then adding the dispersing agent and the adhesive step by step again, and carrying out secondary spray granulation to obtain secondary granulated powder; and sintering the secondary granulation powder at high temperature, and screening. The spherical yttrium oxide powder obtained through the method is high in absolute purity, high in balling rate, good in fluidity, high in apparent density and low in porosity.

The invention relates to the technical field of refractory materials, in particular to a magnesium-calcium-zirconium-carbon brick production method which comprises the following components in parts by weight: 60-80 parts of sintered magnesium-calcium-zirconium sand particles, 10-30 parts of fused magnesia particles, 2-4 parts of zirconium oxide, 0.5-3 parts of silicon carbide fine powder, 2-6 parts of nano yttrium oxide high-dispersion particles, 1-2 parts of C9 petroleum resin powder, 2-7 parts of graphite, 4-6 parts of binding agent and 0.3-0.5 part of urotropin. The rare earth material nano yttrium oxide high-dispersion particles are introduced, the magnesium-calcium-zirconium-carbon brick has the advantages of high temperature resistance, good hydration resistance, good thermal shock resistance, good oxidation resistance and good erosion resistance, the magnesium-calcium-zirconium-carbon brick is dried by an electric drying kiln as an unburned brick, a tunnel kiln firing process is omitted, the labor cost and energy consumption are reduced, and the production cost is reduced. And the emission of greenhouse gas and toxic and harmful gas generated by fuel combustion is avoided, and the biomass fuel is an environment-friendly product.

The invention discloses yttrium oxide-aluminum oxide transition layer composite ceramic and a preparation method and application thereof.The preparation method comprises the steps that quantitative aluminum oxide powder, transition mixed powder and yttrium oxide powder are sequentially laid in a forming mold of a cold isostatic pressing machine from bottom to top, and then the powder raw materials in the forming mold are evenly pressurized through the cold isostatic pressing technology; a formed ceramic green body is obtained; the formed ceramic green body is machined into a designed shape and then sintered, the composite ceramic with the aluminum oxide part as an aluminum oxide base material, the transition mixed powder as a transition layer and the yttrium oxide part as a coating is obtained, the transition layer can reduce a gap of a bonding interface of yttrium oxide and aluminum oxide, and the interface is seamlessly connected and is more compact; in addition, aluminum oxide particles and yttrium oxide powder particles in the transition layer are uniformly mixed and embedded with each other, so that the mechanical locking between materials is obviously improved, and the binding force is stronger; the problems that in the prior art, an yttrium oxide etching-resistant protective coating is poor in binding force and prone to peeling off are solved.

The invention belongs to the technical field of rare earth materials, and discloses a preparation method of high-purity sphere-like nano yttrium oxide powder. The method comprises the following preparation steps: (1) adding Y2O3 powder into concentrated hydrochloric acid, heating, stirring and dissolving, and then diluting with an ethanol water solution to obtain a YCl3 solution; (2) mixing ammonia water, a quaternary ammonium base aqueous solution and ethanol to prepare a precipitant solution, and dropwise adding the precipitant solution into the YCl3 solution in the step (1) for precipitation reaction to precipitate Y < 3 + >; and (3) separating and drying the precipitate obtained in the step (2), and then carrying out high-temperature calcination to obtain the high-purity spheroidal nano yttrium oxide powder. According to the preparation method, the ethanol water solution of YCl3 is used as a reaction solution, ammonia water is used as a main precipitator, quaternary ammonium base is used as an auxiliary precipitator and a surface active structure regulating agent, and yttrium oxide powder with the purity not lower than 5N and the particle size smaller than 100nm can be obtained.

The invention discloses 95 aluminum oxide ceramic for a vacuum switch and a preparation method of the 95 aluminum oxide ceramic, and belongs to the technical field of aluminum oxide ceramic and vacuum switches. The ceramic disclosed by the invention is prepared from the following raw materials: 3 to 5 parts of nano alpha-aluminum oxide, 0.05 to 0.1 part of yttrium oxide, 0.04 to 0.08 part of lanthanum oxide, 0.3 to 0.6 part of zirconium silicate, 3.0 to 4.5 parts of fused quartz, 1 to 1.6 parts of magnesium fluoride, 0.3 to 0.5 part of calcium carbonate, 0.3 to 0.5 part of barium carbonate, 1.5 to 2.5 parts of Suzhou clay and 93 to 94 parts of micron alpha-aluminum oxide. The prepared high-performance 95 aluminum oxide ceramic has excellent breaking strength, electric breakdown strength, thermal shock resistance, chemical stability and the like, can meet the performance requirements of a high-pressure vacuum tube in a severe working environment, and ensures the working stability of a circuit.

The invention relates to the technical field of refractory materials, and discloses a rotary kiln lining refractory material and a preparation method thereof, the raw materials comprise mullite, boron carbide, calcium hexaluminate, silicon carbide, silica powder, alpha-alumina micro powder, coating powder, modified refractory fiber, and a binder. The mullite and the boron carbide are selected as base materials and have excellent acid corrosion resistance, the titanium dioxide and the aluminum oxide are used for treating the refractory fibers, so that a compact enrichment layer is formed, low-temperature sintering is promoted by adding the yttrium oxide, the titanium dioxide is introduced into the refractory fibers, and the corrosion resistance of the refractory fibers is improved. And micropores in the fiber surface can be blocked, so that the porosity of the refractory material is reduced, and the diffusion path of acid steam is prolonged. The refractory material provided by the invention has excellent high-temperature stability and corrosion resistance.

The invention discloses a preparation method of low-temperature rapid densification silicon nitride ceramic based on an aluminum oxide-yttrium oxide composite sintering aid, and aims to solve the problems of high temperature, high energy consumption, difficult densification and the like in the existing Si3N4 ceramic preparation. The preparation method comprises the following steps: 1, mixing alpha-Si3N4 powder, Y2O3 powder and Al2O3 powder, and carrying out ball milling dispersion to obtain mixed powder; 2, carrying out rotary evaporation drying on the mixed powder under a vacuum condition; 3, carrying out heat preservation treatment under the conditions of 1600-1700 DEG C and 40-60 MPa through a spark plasma sintering process; and 4, demolding after cooling. Under the action of the Al2O3-Y2O3 composite sintering aid, phase transformation from alpha-Si3N4 to beta-Si3N4 is remarkably promoted, the relative density of the ceramic reaches 97%-99%, the fracture toughness of the ceramic is 5.21 MPa.m < 1 / 2 >, and the bending strength of the ceramic is 924.99 MPa.

The invention discloses a method for preparing submicron aluminum nitride powder from aluminum oxide powder, carbon black and yttrium oxide auxiliaries. The preparation method specifically comprises the following steps: mixing alumina powder, carbon black and yttrium oxide in absolute ethyl alcohol according to a certain proportion, putting the mixed liquid and a certain mass of ball-milling beads into an alumina ball-milling tank, and carrying out ball-milling for a certain time in a planetary ball mill at a certain rotating speed; transferring the obtained mixture into a glass dish, and drying in a drying oven for a period of time to obtain a precursor mixture; and grinding the dried precursor mixture, placing the ground precursor mixture in an alumina crucible, nitriding in a nitrogen atmosphere, and decarburizing in an air atmosphere to obtain the aluminum nitride powder.

The invention relates to a silicon-based ceramic, a preparation method and application thereof, and a removal method of a ceramic core for titanium alloy casting, the raw materials of the silicon-based ceramic comprise solid powder and a binder, the solid powder comprises 60-100 wt% of silicon dioxide, 0-10 wt% of mullite, 0-10 wt% of kaolin and 0-20 wt% of yttrium oxide; the mass ratio of the solid powder to the binder is 1: (0.01-0.05); the contents of mullite, kaolin and yttrium oxide are all greater than 0; the silicon-based ceramic provided by the invention has excellent room high temperature mechanical properties and good dissolution performance.

The invention provides a plasma spraying high-temperature-erosion-resistant coating and a coating preparation method, and relates to the technical field of material surface treatment. Comprising the following components in parts by mass: 30-45 parts of tungsten carbide, 15-25 parts of chromium carbide-nickel-chromium alloy, 15-25 parts of yttria-stabilized zirconia, 5-10 parts of aluminum oxide-titanium dioxide composite ceramic, 10-20 parts of nickel-chromium-aluminum-yttrium alloy, 1-3 parts of nano aluminum oxide and 1-3 parts of lanthanum oxide. Multiphase collaborative design is adopted, tungsten carbide and chromium carbide-nickel-chromium alloy form double hard phases, the hardness is higher, aluminum oxide-titanium dioxide composite ceramic fills pores and improves compactness, rare earth and nanometer are adopted to cooperate, lanthanum oxide and nanometer aluminum oxide react to generate a LaAlO3 protective layer, oxidation weight gain is small, oxygen diffusion is inhibited, nanometer aluminum oxide refines grains, and the hardness is higher. In conclusion, the high-temperature oxidation resistance is high, and the erosion rate is low.

The invention provides a setter plate for sintering a powder metallurgy product and a preparation method of the setter plate, and belongs to the technical field of setter plates. The refractory material is prepared from the following raw materials in parts by weight: 20-40 parts of fused zirconium mullite, 20-40 parts of modified sintered corundum, 30-50 parts of alumina micro powder, 0.5-1 part of yttrium oxide / alumina-carbon nanotube hollow microsphere powder, 0.5-1 part of zinc oxide micro powder and 5-10 parts of a binder. The setter plate for sintering the powder metallurgy product has the advantages of good heat insulation, high temperature resistance, thermal shock resistance and chemical stability, good mechanical properties, good hardness and good wear resistance, the problems of cracking, deformation and the like caused by thermal shock are reduced, the service life of the setter plate is prolonged, and the setter plate has a wide application prospect.

A component of a plasma processing chamber is provided. An yttrium oxide coating is formed on a surface of the component body, where the yttrium oxide coating is deposited by aerosol deposition and annealed, where the yttrium oxide coating is at least 95% by weight of pure yttrium oxide.

The invention discloses a wear-resistant hard alloy material and a preparation method thereof, and particularly relates to the field of alloy materials.The wear-resistant hard alloy material comprises tungsten carbide, cobalt powder, graphene aerogel fragments, coconut shell carbonized porous carbon, yttrium oxide and auxiliaries, and a multi-scale reinforcing system is constructed by optimizing the proportion. According to the preparation method, supercritical drying is combined with a microwave reaction sintering process, and material densification is realized through gradient temperature control and steam concentration accurate regulation and control in a specific atmosphere. Graphene aerogel fragments and porous carbon form a three-dimensional interpenetrating network, so that the wear resistance and the conductivity are synergistically improved; yttrium oxide is segregated at a grain boundary to form a high-temperature anti-oxidation barrier; the gradient sintering process effectively eliminates internal stress and inhibits abnormal growth of grains. The technical bottleneck that wear resistance and toughness of traditional hard alloy are difficult to synergistically improve is broken through, excellent conductivity and high-temperature stability are achieved, and the industrial problems that wear resistance / toughness is inverted, a conductive network is low in efficiency, and the high-temperature stability is poor are solved.

The invention discloses a high-thermal-conductivity insulating electric power engineering material and a preparation method thereof, and relates to the technical field of insulating material preparation. The composite material is prepared from 40-60 parts of polyimide resin, 20-30 parts of boron nitride nanosheets, 10-15 parts of alumina micro powder, 5-10 parts of a silane coupling agent, 3-8 parts of a plasticizer, 2-5 parts of an antioxidant, 1-3 parts of carbon nanotube whiskers, 1-2 parts of graphene quantum dots and 0.5-1 part of rare earth yttrium oxide. The diameter-thickness ratio of the boron nitride nanosheet is 100-200, the particle size of the alumina micro powder is 1-5 [mu] m, the diameter of the carbon nanotube whisker is 5-20 nm, the length is 1-5 [mu] m, and the particle size of the graphene quantum dot is 2-10 nm; all the raw materials are synergistically matched, so that the material is expected to have high thermal conductivity and excellent insulating property and is suitable for the field of electric power engineering. The material has high thermal conductivity and excellent insulativity, the thermal conductivity coefficient is not lower than 5 W / (m.K), the volume resistivity is not lower than 1015 omega.cm, and the breakdown field strength is not lower than 30 kV / mm.