The invention discloses a method for preparing an
ion source filament protective thermal
adaptation thorium oxide coating, and particularly relates to the technical field of inorganic membrane materials. The method comprises the following steps of S1, base material pretreatment, S2, pre-
sputtering treatment, S3,
chromium transition layer deposition, S4, Cr-ThO2 gradient co-
sputtering layer deposition, S5, pure
thorium oxide functional layer deposition and S6,
vacuum annealing treatment. According to the method for preparing the
ion source filament protective thermal
adaptation thorium oxide coating, through the double buffering design of the
chromium transition layer and the Cr-ThO2 gradient layer,
continuous transition of the
thermal expansion coefficient between the
alloy matrix and the
thorium oxide coating is achieved, and the interface stress in the cold and hot circulation process is effectively relieved. Tests show that after the coating is subjected to hot and cold
impact for 20 times at the
room temperature to 650 DEG C, the phenomena of
cracking and peeling are avoided, the
thermal stability is obviously superior to that of the prior art, each coating is prepared by adopting a magnetron
sputtering process, the film layer is compact and uniform, the
porosity is lower than 2%, and the coating is far superior to that prepared by adopting a traditional
sol-
gel method and a spray
sintering method.