High-purity or toxic fluid recovery device
A recovery device and fluid technology, which is applied in the field of high-purity or toxic fluid recovery devices, can solve the problems of difficult operation and maintenance of experimental devices, lack of instantaneous recovery capability, and low effective utilization of liquid nitrogen, and achieves compact structure and improved efficiency. The effect of heat exchange area and long maintenance cycle
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[0026] The embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, but the present invention can be implemented in various ways defined and covered by the claims.
[0027] Pretreatment before use: The inner layer pressure vessel 10 of the present invention is used to contain high-purity or toxic fluids, and needs to be vacuumed to 1E-4Pa, or according to the purity requirements of the working medium, the vacuum degree should be properly required. In order to promote the rapid release of gas adsorbed on the inner surface of the inner pressure vessel 10, fluid heating may be used. There are 3 options for pipelines and valves for fluid entry and exit, the first valve and pipeline 1, the coil valve 2 and fluid coil 11, and the second valve and pipeline 6. The fluid is injected from the first valve and pipeline 1 or the second valve and pipeline 6, and flows out from the fluid coil 11 and the coil valve 2. Only less flui...
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