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A metasurface lens and a spatial light modulator comprising the metasurface lens

A metasurface, electro-optic modulation technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of small chromatic aberration range, optical focal length and numerical aperture cannot be adjusted, etc., to improve the modulation of spatial orientation and enhance the effect of restraint

Active Publication Date: 2021-09-17
RES INST OF SOUTHEAST UNIV IN SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, although the metasurface lens has the advantages of compact structure and small chromatic aberration range, it is still the same as the traditional lens. Once the design is confirmed, the optical focal length and numerical aperture cannot be adjusted, resulting in certain limitations in the application field. Therefore, the development Planar electrically tunable metasurface lens has very important application value

Method used

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  • A metasurface lens and a spatial light modulator comprising the metasurface lens
  • A metasurface lens and a spatial light modulator comprising the metasurface lens
  • A metasurface lens and a spatial light modulator comprising the metasurface lens

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Embodiment 1

[0026] Such as Figure 1~2 , The metasurface lens includes from bottom to top: a dielectric layer 1, a conductive layer 2 and an electro-optic modulation material layer 3, the conductive layer 2 is in the shape of a cuboid, and separates the dielectric layer 1 and the electro-optic modulation material layer 3. The material of the dielectric layer 1 is silicon dioxide, silicon nitride or aluminum oxide, and the thickness of the dielectric layer 1 is 0.5 μm˜10 μm. The material of the conductive layer 2 is gold, titanium, chromium, zinc oxide, graphene or indium tin oxide, and the thickness of the conductive layer 2 is 5nm˜100nm.

[0027] A plurality of disconnected square grooves 4 are formed on the upper surface of the electro-optical modulation material layer 3 , and metal electrodes 5 are filled in the grooves 4 . The power supply 6 of the metasurface lens includes several pulse voltage sources 601 . The positive end of the pulse voltage source 601 is electrically connected...

Embodiment 2

[0032] Such as Figure 4, the rest of this embodiment is the same as that of Embodiment 1, the only difference is that several grooves 4 are obtained by etching the electro-optic modulation material layer 3, and in the process of etching the electro-optic modulation material layer 3, the recesses are not completely etched away. The electro-optic modulation material layer 3 in the groove 4 means that a part of the electro-optic modulation material layer 3 is reserved in each groove 4 , and the remaining part of the electro-optic modulation material layer 3 forms several protrusions 7 . The protrusion 7 is surrounded by the metal electrode 5 , and the upper surface of the protrusion 7 may be circular, that is, the protrusion 7 is cylindrical as a whole. Retaining the protrusions 7 in the grooves 4 can enhance the confinement of the laser light during light guiding, and realize the modulation of the spatial orientation of the beams penetrating the protrusions 7, thereby improving...

Embodiment 3

[0034] Such as Figure 5-6 , the rest of this embodiment is the same as that of Embodiment 1, the only difference is that the conductive layer 2 is grid-shaped. The metasurface lens includes from bottom to top: a dielectric layer 1, a conductive layer 2, and an electro-optic modulation material layer 3. The dielectric layer 1 is etched to form a grid groove, and the grid-shaped conductive layer is filled in the grid groove. Layer 2, to increase the transmittance of the light beam. A plurality of disconnected square grooves 4 are formed on the upper surface of the electro-optical modulation material layer 3 , and metal electrodes 5 are filled in the grooves 4 . The power supply 6 of the metasurface lens includes several pulse voltage sources 601 . The positive end of the pulse voltage source 601 is electrically connected to a metal electrode 5, and the negative ends of all the pulse voltage sources 601 are electrically connected to the conductive layer 2 and grounded, and the...

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Abstract

The invention discloses a metasurface lens, which sequentially includes a dielectric layer, a conductive layer and an electro-optical modulation material layer, and a plurality of disconnected grooves are arranged on the electro-optic modulation material layer, and the grooves are filled with metal electrodes; the metasurface lens also includes Power supply, the power supply includes a number of pulse voltage sources, the positive end of the pulse voltage source is electrically connected to the metal electrode, the negative end is electrically connected to the conductive layer and grounded, and the voltage values ​​of the pulse voltage sources loaded on two adjacent metal electrodes are mutually Are not the same. The invention also discloses a spatial light modulator, which includes a laser and the above-mentioned supersurface lens, and the supersurface lens is arranged on the laser. The invention can realize the dynamic adjustment of the spatial orientation, optical focal length and numerical aperture of the light beam passing through the metasurface lens by electrically adjusting the refractive index of the modulating material constituting the metasurface lens.

Description

technical field [0001] The invention relates to a lens and a modulator, in particular to a metasurface lens and a spatial light modulator containing the metasurface lens. Background technique [0002] Harvard University professor Federico Capasso's research group first proposed the concept of metasurfaces in 2011, and published research on related technologies of metasurface lenses (Metalens) in Science in 2016, which made metasurface lenses gradually enter the field of optics researchers. The field of view of the metasurface lens uses its planar sub-wavelength resonant unit to shape the wavefront of the light wave, which has extremely high design flexibility and surpasses the traditional combined lens to achieve compact and efficient imaging. Surface lenses have great application prospects in the field of micro-nano integrated optics. [0003] At present, although the metasurface lens has the advantages of compact structure and small chromatic aberration range, it is still...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/01G02F1/03
CPCG02F1/0102G02F1/0121G02F1/0305G02F1/0327G02F2203/12
Inventor 范谦顾星华斌倪贤锋
Owner RES INST OF SOUTHEAST UNIV IN SUZHOU
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