Flexible interdigital capacitive sensor structure and preparation method thereof

An interdigital capacitance and sensor technology, which is applied in the field of flexible electronic equipment, can solve the problems of lack of preparation and performance research of flexible interdigital sensors, lack of sensor parameter sensor performance characterization, long preparation time of flexible interdigital sensors, etc., to achieve low cost, Thin and light appearance, the effect of improving the response sensitivity

Active Publication Date: 2021-06-15
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] (1) The response of the current flexible interdigital sensors comes from the electrical signal changes caused by the change of the dielectric layer spacing between the interdigital electrodes, and the response sensitivity is small
[0017](2) In most patents, the preparation time of flexible interdigital sensors is relatively long, which is not suitable for mass production, and there are many kinds of materials used in the preparation of sensors and electrodes
[0018](3) The materials or solvents used in the preparation of flexible interdigital sensors in many patents have certain toxicity, which will cause certain damage to the health of the prepared experimenters and users. also pollute the environment
[0019](4

Method used

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  • Flexible interdigital capacitive sensor structure and preparation method thereof
  • Flexible interdigital capacitive sensor structure and preparation method thereof
  • Flexible interdigital capacitive sensor structure and preparation method thereof

Examples

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Embodiment 1

[0050] Example 1: The formula of liquid silicone rubber used as the substrate of the flexible finger capacitive sensor and the upper packaging layer is mixed with 85wt% PDMS prepolymer and 15wt% curing agent Dow Corning 184B, and the viscosity after mixing is 1724mPa·s; it is used as a flexible finger The conductive rubber formula of the interdigital electrode layer of the capacitive sensor is 44wt% liquid silicone rubber (vinyl-terminated polydimethylsiloxane, 15Pa.s, density 1.2g / cm 3 ), 25wt% silver-plated glass fiber (silver plating amount 18wt%, aspect ratio 200μm: 8μm), 6wt% carbon fiber (aspect ratio 120μm: 8μm), 20wt% diluent (simethicone) and 5wt% synergistic Agents (1,2-propanediol) were mixed uniformly in order. Prepare according to the following steps: ①Preparation of the base layer, put the mixed liquid silicone rubber into the spray gun, spray it on the PET under the pressure of 0.6MPa to form a film, and further carry out vacuum degassing under the environment o...

Embodiment 2

[0052] Example 2: The formula of liquid silicone rubber used as the substrate and upper packaging layer of the flexible fork finger capacitive sensor is mixed with 80wt% PDMS prepolymer and 20wt% curing agent Dow Corning 184B, and the viscosity after mixing is 1500mPa·s; used as a flexible fork The conductive rubber formula of the interdigital electrode layer of the finger capacitive sensor is 40wt% liquid silicone rubber (vinyl-terminated polydimethylsiloxane, 14Pa.s, density 1.2g / cm 3 ), 20wt% silver-plated glass fiber (silver plating amount 18wt%, aspect ratio 200μm: 8μm), 10wt% carbon fiber (aspect ratio 120μm: 8μm), 20wt% diluent (simethicone) and 10wt% synergistic Agents (1,2-propanediol) were mixed uniformly in order. Prepare according to the following steps: ①Preparation of the base layer, put the mixed liquid silicone rubber into the spray gun, spray it on the PET under the pressure of 0.6MPa to form a film, and further carry out vacuum degassing under the environment...

Embodiment 3

[0054] Embodiment 3: The formula of the liquid silicone rubber used as the substrate of the flexible finger capacitive sensor and the upper packaging layer is mixed with 87wt% PDMS prepolymer and 13wt% curing agent Dow Corning 184B, and the viscosity after mixing is 1834mPa·s; used as a flexible finger The conductive rubber formula of the interdigital electrode layer of the capacitive sensor is 50wt% liquid silicone rubber (vinyl-terminated polydimethylsiloxane, 16Pa.s, density 1.2g / cm 3), 25wt% silver-plated glass fiber (silver plating amount 18wt%, aspect ratio 200μm: 8μm), 5wt% carbon fiber (aspect ratio is 120μm: 8μm), 10wt% diluent (simethicone) 10wt% synergist (1,2-Propanediol) Mixed uniformly in order. Prepare according to the following steps: ①Preparation of the base layer, put the mixed liquid silicone rubber into the spray gun, spray it on the PET under the pressure of 0.6MPa to form a film, and further carry out vacuum degassing under the environment of -0.1MPa, Fi...

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Abstract

The invention provides a flexible interdigital capacitive sensor structure and a preparation method thereof. The sensor is composed of a substrate layer, a middle interdigital electrode layer and an upper packaging layer; the silicone rubber of the substrate layer and the silicone rubber of the upper packaging layer are formed by uniformly mixing a liquid prepolymer and a curing agent; conductive rubber used for printing the interdigital electrode is formed by uniformly mixing liquid silicone rubber, rigid conductive fiber particles, a diluent and a synergist. The preparation of the sensor comprises the steps that: preparing a substrate film, preparing an interdigital electrode; preparing an upper packaging layer; implanting an electrode; and optimizing the thicknesses of the substrate layer and the upper packaging layer of the sensor and various parameters of the interdigital electrode. In addition, the sensor has a relatively large strain working range, and has the characteristics of high sensitivity, long service life, sensing stability at different stretching speeds and real-time detection capability and characteristics of consistency of sensing detection of human body motion.

Description

technical field [0001] The invention discloses a method for preparing a flexible interdigital capacitive sensor, belonging to the field of flexible electronic equipment. Background technique [0002] In the past ten years, flexible sensors have been intensively studied and widely used in artificial intelligence, medical health, and electronic skin. Compared with piezoresistive, piezoelectric and field-effect transistor sensors, capacitive sensors are favored by researchers because of their simple structure, good temperature stability, fast dynamic response and high sensitivity. [0003] Conventional parallel-plate capacitive flexible sensors have a triple-sandwich structure, including top and bottom electrode layers and an insulating dielectric layer in the middle. The methods to improve sensitivity are mostly to build microstructures and porous structures. Since this type of sensor requires a certain microstructure to maintain the sensitivity of the sensor, it is difficult...

Claims

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Application Information

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IPC IPC(8): G01D5/24G01D5/241C08L83/07C08L83/04C08K9/02C08K7/14C08K7/06C08K5/053
CPCG01D5/2405G01D5/2417C08L83/04C08L2205/025C08K9/02C08K7/14C08K7/06C08K5/053
Inventor 夏志东涂志葛林健罗卫初
Owner BEIJING UNIV OF TECH
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